公开(公告)号：US20170122496A1

公开(公告)日：2017-05-04

申请号：US15317821

申请日：2015-06-11

Applicant: ENTEGRIS, INC.

Inventor： Chris Scannell

IPC: F17C13/04

CPC classification number: F17C13/04 ,  F17C2201/06 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2260/02 ,  F17C2270/0518

Abstract: A fluid supply package is described, including a pressure-regulated fluid storage and dispensing vessel comprising a fluid dispensing flow path, and adsorbent disposed in the flow path or in fluid communication therewith to reversibly adsorb fluid from the flow path for pressure stabilization of fluid dispensed from the vessel. A corresponding method is disclosed, of stabilizing fluid pressure during dispensing of fluid through a fluid flow path in a fluid supply package, by contacting the fluid in the fluid flow path with an adsorbent on which the fluid is reversibly adsorbable during the dispensing of fluid. Such approach of using a pressure management adsorbent stabilizes fluid pressure during fluid dispensing, and combats pressure oscillations that may occur during initiation or subsequent performance of fluid dispensing.

公开(公告)号：US10247363B2

公开(公告)日：2019-04-02

申请号：US15549875

申请日：2016-02-12

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. Sweeney ,  Edward E. Jones ,  Joseph R. Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Chris Scannell

IPC: G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.