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公开(公告)号：US20200011482A1
公开(公告)日：2020-01-09
申请号：US16577711
申请日：2019-09-20
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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公开(公告)号：US20190170302A1
公开(公告)日：2019-06-06
申请号：US16271339
申请日：2019-02-08
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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公开(公告)号：US20190339726A1
公开(公告)日：2019-11-07
申请号：US16375176
申请日：2019-04-04
Applicant: ENTEGRIS, Inc.
Inventor： Edward Edmiston JONES , Paul EIDSMORE
IPC: G05D16/06 , F16K17/24 , F16K31/126
Abstract: A pressure regulator device for use within a pressure-regulated fluid storage and dispensing vessel primarily in low flow, low delivery pressure applications. Regulator stiction challenges have been solved with an improved poppet assembly using different poppet element configurations as well as an improved bellows structure in the pressure-sensing assembly that provides more flexibility during contraction and expansion of the diaphragm elements.
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