公开(公告)号：US20250034700A1

公开(公告)日：2025-01-30

申请号：US18785339

申请日：2024-07-26

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried ,  Surendra Maharjan ,  Stephen Longo

IPC: C23C16/30 ,  C23C16/52

Abstract: Surface modified substrates and related methods are provided. A substrate having a modified surface comprises a first region and a second region. The first region is located above the second region. The first region comprises a nickel fluoride. The second region comprises a nickel alloy. A concentration of the nickel fluoride gradually decreases from the first region to the second region.

公开(公告)号：US20250034694A1

公开(公告)日：2025-01-30

申请号：US18780569

申请日：2024-07-23

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried ,  Surendra Maharjan ,  Stephen Longo

IPC: C23C8/08

Abstract: Surface modified substrates and related methods are provided. A substrate having a modified surface comprises a first region and a second region. The first region is located above the second region. The first region comprises an aluminum fluoride. The second region comprises an aluminum alloy. A concentration of the aluminum fluoride gradually decreases from the first region to the second region.