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公开(公告)号：US20200152496A1
公开(公告)日：2020-05-14
申请号：US16076082
申请日：2017-02-09
申请人： ENTEGRIS, Inc.
IPC分类号： H01L21/673
摘要： A substrate container (1100) includes a shell (1105) defining an opening and a door (1505) for selectively sealing the opening. A cantilevered support tray (1120) supports a substrate (1115) within the shell (1105). The support tray (1120) includes a support collar (1300) for coupling the support tray (1120) to a support post (1215) such that the support tray (1120) is cantilevered from the support post (1215).
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公开(公告)号：US09556012B2
公开(公告)日：2017-01-31
申请号：US14478632
申请日：2014-09-05
申请人： ENTEGRIS, INC.
发明人： John A. Leys , John M. Hennen , Michael L. Johnson
CPC分类号： B67D7/0255 , B65D83/0055 , B67D2001/0828 , Y10T29/49826
摘要： A bag-in-bag-in-bottle assembly formed by a flexible dispensing container with a dispensing fitment. The dispensing container is positioned adjacent or sandwiched between one or more flexible pressurization containers having a separate inlet/outlet path through a second fitment. The bag-in-bag assembly can then be placed in a containment vessel with the fitments mounted such that it is accessible on the vessel. A liquid can be extracted from the dispensing container by introducing a fluid into the pressurization container(s) with enough pressure to force the liquid out through the dispensing fitment. A contoured dispensing head may be coupled to the bag-in-bag-in-bottle assembly using a cam actuation arrangement for simultaneously locking the pressurization, vent and fluid extraction couplings.
摘要翻译： 由具有分配配件的柔性分配容器形成的袋中袋式瓶组件。 分配容器定位成相邻或夹在一个或多个具有通过第二配件的独立入口/出口路径的柔性加压容器之间。 然后袋式包装组件可以放置在容纳容器中，其中安装的配件使得其在容器上可接近。 通过以足够的压力将流体引入加压容器中以迫使液体通过分配配件而从分配容器中提取出液体。 轮廓分配头可以使用凸轮致动装置联接到袋内袋式瓶子组件，用于同时锁定加压，排气和流体抽出联接件。
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公开(公告)号：US20190019704A1
公开(公告)日：2019-01-17
申请号：US16076820
申请日：2017-02-09
申请人： ENTEGRIS, Inc.
IPC分类号： H01L21/673
摘要： A substrate container (100) includes a base (105) and a cover (115). The cover (115) mates with the base (105) to define an enclosure. A stack of interlocking trays (405) can be disposed within the base (105). Each interlocking tray (405) includes an inset flange (410) defining a registration face (420) for supporting a substrate. The interlocking tray (405) also includes a shoulder portion (415). A relief feature (435) is defined at the junction point between the shoulder portion (415) and the registration face (420). The relief feature (435) may prevent the sharp edges of the substrate from contacting the shoulder portion (415), thereby reducing particle generation.
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公开(公告)号：US20190019703A1
公开(公告)日：2019-01-17
申请号：US16076817
申请日：2017-02-09
IPC分类号： H01L21/673
摘要： A substrate container (100) includes a receptacle (105) and a cover (110). The receptacle (105) includes a base portion (115) for supporting a substrate and a side wall portion (120) extending upward from the base portion (115). The cover (110) defines a closure over the receptacle (105). In one embodiment, the receptacle (105) includes a first alignment feature (300, 305) located on an exterior surface of the receptacle (105). The first alignment feature (300, 305) interfaces with automation for aligning the receptacle (105). In another embodiment, the cover (110) includes a contoured surface (135) for applying a compressive load to the contents of the substrate container (100).
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公开(公告)号：US20150001250A1
公开(公告)日：2015-01-01
申请号：US14478632
申请日：2014-09-05
申请人： ENTEGRIS, INC.
发明人： John A. LEYS , John M. HENNEN , Michael L. Johnson
IPC分类号： B67D7/02
CPC分类号： B67D7/0255 , B65D83/0055 , B67D2001/0828 , Y10T29/49826
摘要： A bag-in-bag-in-bottle assembly formed by a flexible dispensing container with a dispensing fitment. The dispensing container is positioned adjacent or sandwiched between one or more flexible pressurization containers having a separate inlet/outlet path through a second fitment. The bag-in-bag assembly can then be placed in a containment vessel with the fitments mounted such that it is accessible on the vessel. A liquid can be extracted from the dispensing container by introducing a fluid into the pressurization container(s) with enough pressure to force the liquid out through the dispensing fitment. A contoured dispensing head may be coupled to the bag-in-bag-in-bottle assembly using a cam actuation arrangement for simultaneously locking the pressurization, vent and fluid extraction couplings.
摘要翻译： 由具有分配配件的柔性分配容器形成的袋中袋式瓶组件。 分配容器定位成相邻或夹在一个或多个具有通过第二配件的独立入口/出口路径的柔性加压容器之间。 然后袋式包装组件可以放置在容纳容器中，其中安装的配件使得其在容器上可接近。 通过以足够的压力将流体引入加压容器中以迫使液体通过分配配件而从分配容器中提取出液体。 轮廓分配头可以使用凸轮致动装置联接到袋内袋式瓶子组件，用于同时锁定加压，排气和流体抽出联接件。
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