Method And Tool For Measuring The Geometric Structure Of An Optical Component
    1.
    发明申请
    Method And Tool For Measuring The Geometric Structure Of An Optical Component 有权
    用于测量光学元件几何结构的方法和工具

    公开(公告)号:US20150055126A1

    公开(公告)日:2015-02-26

    申请号:US14384119

    申请日:2013-03-08

    IPC分类号: G01M11/02

    摘要: The subject of the present invention is a method and a system for measuring the geometric or optical structure of an optical component. In particular, the invention relates to a method for measuring the geometric structure of a component bounded by a first side (10) and a second side (20), said method comprising steps of: (S1) measuring a first signal (MS1) resulting from a first conversion of a first probe signal (PS1), by at least said first side (10); (S2) measuring a second signal (MS2) resulting from a second conversion of a second probe signal (PS2), by at least said second side (20); (S3) determining a third conversion making it possible to convert a first set of coordinates (R1) associated with the measurement of the first signal (MS1) to a second set of coordinates (R2) associated with the measurement of the second signal (MS2); (S10) estimating said first side (10) using the first signal (MS1), said first simulation and a first cost criterion (V1) quantifying a difference between the estimation (FS1) and the first signal (MS1); and (S20) estimating said second side (20) using the second signal (MS2), said second simulation, said third conversion and a second cost criterion (V2) quantifying a difference between the estimation (ES2) and the second signal (MS2).

    摘要翻译: 本发明的主题是用于测量光学部件的几何或光学结构的方法和系统。 特别地,本发明涉及一种用于测量由第一侧(10)和第二侧(20)界定的部件的几何结构的方法,所述方法包括以下步骤:(S1)测量产生的第一信号(MS1) 至少所述第一侧(10)从第一探测信号(PS1)的第一转换开始。 (S2)通过至少所述第二侧(20)测量由第二探测信号(PS2)的第二转换产生的第二信号(MS2); (S3)确定第三转换,使得可以将与第一信号(MS1)的测量相关联的第一组坐标(R1)转换为与第二信号(MS2)的测量相关联的第二坐标系(R2) ); (S10)使用第一信号(MS1),所述第一模拟和量化估计(FS1)与第一信号(MS1)之间的差的第一成本标准(V1))来估计所述第一侧(10) 以及(S20)使用第二信号(MS2),所述第二模拟,所述第三转换和第二成本标准(V2)估计所述第二侧(20),以及量化估计(ES2)和第二信号(MS2)之间的差的第二成本标准 。

    Method and tool for measuring the geometric structure of an optical component
    2.
    发明授权
    Method and tool for measuring the geometric structure of an optical component 有权
    用于测量光学部件几何结构的方法和工具

    公开(公告)号:US09109976B2

    公开(公告)日:2015-08-18

    申请号:US14384119

    申请日:2013-03-08

    IPC分类号: G01M11/02 G01B11/24

    摘要: The subject of the present invention is a method and a system for measuring the geometric or optical structure of an optical component. In particular, the invention relates to a method for measuring the geometric structure of a component bounded by a first side (10) and a second side (20), said method comprising steps of: (S1) measuring a first signal (MS1) resulting from a first conversion of a first probe signal (PS1), by at least said first side (10); (S2) measuring a second signal (MS2) resulting from a second conversion of a second probe signal (PS2), by at least said second side (20); (S3) determining a third conversion making it possible to convert a first set of coordinates (R1) associated with the measurement of the first signal (MS1) to a second set of coordinates (R2) associated with the measurement of the second signal (MS2); (S10) estimating said first side (10) using the first signal (MS1), said first simulation and a first cost criterion (V1) quantifying a difference between the estimation (FS1) and the first signal (MS1); and (S20) estimating said second side (20) using the second signal (MS2), said second simulation, said third conversion and a second cost criterion (V2) quantifying a difference between the estimation (ES2) and the second signal (MS2).

    摘要翻译: 本发明的主题是用于测量光学部件的几何或光学结构的方法和系统。 特别地,本发明涉及一种用于测量由第一侧(10)和第二侧(20)界定的部件的几何结构的方法,所述方法包括以下步骤:(S1)测量产生的第一信号(MS1) 至少所述第一侧(10)从第一探测信号(PS1)的第一转换开始。 (S2)通过至少所述第二侧(20)测量由第二探测信号(PS2)的第二转换产生的第二信号(MS2); (S3)确定第三转换,使得可以将与第一信号(MS1)的测量相关联的第一组坐标(R1)转换为与第二信号(MS2)的测量相关联的第二坐标系(R2) ); (S10)使用第一信号(MS1),所述第一模拟和量化估计(FS1)与第一信号(MS1)之间的差的第一成本标准(V1))来估计所述第一侧(10) 以及(S20)使用第二信号(MS2),所述第二模拟,所述第三转换和第二成本标准(V2)估计所述第二侧(20),以及量化估计(ES2)和第二信号(MS2)之间的差的第二成本标准 。