公开(公告)号：US20180247785A1

公开(公告)日：2018-08-30

申请号：US15552388

申请日：2016-02-24

申请人： ESTION TECHNOLOGIES GMBH

发明人： Thomas SEBALD

IPC分类号： H01J35/06 ,  H01J35/18

CPC分类号： H01J35/065 ,  H01J35/18 ,  H01J35/186 ,  H01J2235/18 ,  H05H1/48 ,  H05H2001/483

摘要： An X-ray source for ionizing of gases includes a field emission tip array within a vacuum region enclosed by a hood and a part of a support plate. The field emission tip array is arranged electrically insulated with respect to the carrier plate and wired as a cathode connected to a high-voltage source. A transmission window transparent to X-ray radiation is arranged in the hood centrally above the field emission tip array, and the hood is wired as an anode.