公开(公告)号：US20140138346A1

公开(公告)日：2014-05-22

申请号：US13972637

申请日：2013-08-21

Applicant: EverSpin Technologies, Inc.

Inventor： Renu Whig ,  Philip Mather ,  Kenneth Smith ,  Sanjeev Aggarwal ,  Jon Slaughter ,  Nicholas Rizzo

IPC: H01L43/12 ,  G01R33/09

CPC classification number: H01L43/12 ,  B82Y25/00 ,  G01R33/0052 ,  G01R33/09 ,  G01R33/093 ,  G01R33/098 ,  H01L27/22 ,  H01L43/02 ,  H01L43/08

Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.

Abstract translation: 半导体工艺集成了三个桥接电路，每个电路包括在单个芯片上作为惠斯登电桥耦合的磁阻传感器，以在三个正交方向上感测磁场。 该过程包括形成磁阻传感器的各种沉积和蚀刻步骤以及在三个桥接电路中的一个上的多个通量引导器，用于将“Z”轴磁场传送到在XY平面中定向的传感器上。

公开(公告)号：US09269891B2

公开(公告)日：2016-02-23

申请号：US13972637

申请日：2013-08-21

Applicant: EverSpin Technologies, Inc.

Inventor： Renu Whig ,  Philip Mather ,  Kenneth Smith ,  Sanjeev Aggarwal ,  Jon Slaughter ,  Nicholas Rizzo

IPC: H01L43/12 ,  B82Y25/00 ,  G01R33/00 ,  G01R33/09 ,  H01L27/22

CPC classification number: H01L43/12 ,  B82Y25/00 ,  G01R33/0052 ,  G01R33/09 ,  G01R33/093 ,  G01R33/098 ,  H01L27/22 ,  H01L43/02 ,  H01L43/08

Abstract: A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.

Abstract translation: 半导体工艺集成了三个桥接电路，每个电路包括在单个芯片上作为惠斯登电桥耦合的磁阻传感器，以在三个正交方向上感测磁场。 该过程包括形成磁阻传感器的各种沉积和蚀刻步骤以及在三个桥接电路中的一个上的多个通量引导器，用于将“Z”轴磁场传送到在XY平面中定向的传感器上。

公开(公告)号：US09229070B2

公开(公告)日：2016-01-05

申请号：US14533842

申请日：2014-11-05

Applicant: EVERSPIN TECHNOLOGIES, INC.

Inventor： Lianjun Liu ,  Philip Mather ,  Jon Slaughter

IPC: G01R33/02 ,  G01R33/09 ,  G01R15/20 ,  G01R33/04 ,  G01R33/00

CPC classification number: G01R33/0029 ,  G01R33/0041 ,  G01R33/04 ,  G01R33/098

Abstract: A magnitude and direction of at least one of a reset current and a second stabilization current (that produces a reset field and a second stabilization field, respectively) is determined that, when applied to an array of magnetic sense elements, minimizes the total required stabilization field and reset field during the operation of the magnetic sensor and the measurement of the external field. Therefore, the low field sensor operates optimally (with the highest sensitivity and the lowest power consumption) around the fixed external field operating point. The fixed external field is created by other components in the sensor device housing (such as speaker magnets) which have a high but static field with respect to the low (earth's) magnetic field that describes orientation information.

Abstract translation: 确定复位电流和第二稳定电流（分别产生复位场和第二稳定场）中的至少一个的幅度和方向，当应用于磁感测元件的阵列时，使总要求的稳定性最小化 在磁传感器运行期间的场和复位场以及外场测量。 因此，低场传感器在固定的外场操作点周围最佳地运行（具有最高的灵敏度和最低的功耗）。 固定的外部场是由传感器装置外壳（例如扬声器磁体）中的其他部件产生的，这些部件相对于描述取向信息的低（地球）磁场具有高但静止的场。