Sensing contact probe
    1.
    发明授权
    Sensing contact probe 失效
    感应接触探头

    公开(公告)号:US07185440B2

    公开(公告)日:2007-03-06

    申请号:US11183637

    申请日:2005-07-18

    IPC分类号: G01B7/28 G01B7/34

    CPC分类号: G11B9/1436 B82Y10/00 G11B9/02

    摘要: A sensing contact probe includes a beam support and a probe. The probe has a bent beam body that extends from the beam support to a probe tip face that has a position and faces in an angular direction. The bent beam body has first and second beam layers bonded together and have differing residual stresses that bend the beam body. A stress relief region is formed in the bent beam body. The stress relief region has an adjusted stress property that adjusts the bending to control the probe tip face position and angular direction.

    摘要翻译: 感测接触探针包括梁支架和探头。 探头具有弯曲的梁体,其从梁支撑件延伸到具有位于角度方向上的位置和面的探针尖端面。 弯曲梁体具有结合在一起的第一和第二梁层,并且具有使梁体弯曲的不同残余应力。 弯曲梁体中形成有应力消除区域。 应力释放区域具有调整的应力特性,其调节弯曲以控制探针尖端面位置和角度方向。