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公开(公告)号:US20230072851A1
公开(公告)日:2023-03-09
申请号:US17794434
申请日:2021-01-19
Applicant: Edwards Japan Limited
Inventor: Hidekazu Ebara , Masahiro Tanaka
Abstract: A system for treating moisture in exhaust gas uses a cooling trap to remove the moisture contained in the exhaust gas. The system includes a tank that stores, as liquid water, the moisture flown out of the cooling trap and a water level measurement means that measures a water level in the tank. A pipe is connected to a drainage port for draining the water stored in the tank to outside and a valve is disposed in the pipe. Aa valve control means opens the valve to start drainage when the water level in the tank measured by the water level measurement means exceeds a first water level and closes the valve to stop the drainage when a second water level set lower than the first water level is reached. The second water level is provided at a position higher than the drainage port.