公开(公告)号：US20230072851A1

公开(公告)日：2023-03-09

申请号：US17794434

申请日：2021-01-19

Applicant: Edwards Japan Limited

Inventor： Hidekazu Ebara ,  Masahiro Tanaka

IPC: B01D5/00 ,  B01D53/26

Abstract: A system for treating moisture in exhaust gas uses a cooling trap to remove the moisture contained in the exhaust gas. The system includes a tank that stores, as liquid water, the moisture flown out of the cooling trap and a water level measurement means that measures a water level in the tank. A pipe is connected to a drainage port for draining the water stored in the tank to outside and a valve is disposed in the pipe. Aa valve control means opens the valve to start drainage when the water level in the tank measured by the water level measurement means exceeds a first water level and closes the valve to stop the drainage when a second water level set lower than the first water level is reached. The second water level is provided at a position higher than the drainage port.

公开(公告)号：US20240191845A1

公开(公告)日：2024-06-13

申请号：US18554655

申请日：2022-04-22

Applicant: Edwards Japan Limited

Inventor： Jinquan Guan ,  Masahiro Tanaka ,  Mitsunori Abe

IPC: F17D5/02 ,  F17D1/04 ,  F17D3/01

CPC classification number: F17D5/02 ,  F17D1/04 ,  F17D3/01

Abstract: A gas treatment system includes: a main exhaust line for guiding exhaust gas to a detoxification apparatus; a bypass line for guiding the exhaust gas to an emergency detoxification apparatus; an upstream exhaust line; and a three-way valve capable of switching a flow of the exhaust gas from the upstream exhaust line to the main exhaust line or the bypass line, in which the bypass line includes: a gate valve; a gas introduction pipe through which a second gas is introduced; and a pressure gauge configured to detect pressure. When the three-way valve discharges gas to the main exhaust line, in a state where the second gas has been introduced into a closed flow path C between the gate valve and the three-way valve from the gas introduction pipe, internal leakage in the three-way valve is detectable using change in the pressure detected by the pressure gauge.

公开(公告)号：US20210245093A1

公开(公告)日：2021-08-12

申请号：US16972843

申请日：2019-06-03

Applicant: Edwards Japan Limited

Inventor： Nobuo Mori ,  Mitsunori Abe ,  Masahiro Tanaka

IPC: B01D53/38 ,  C23C16/44 ,  B01D53/76 ,  F23G7/06 ,  F23D14/48

Abstract: A detoxification device has an inlet nozzle capable of reducing an amount of a deposit of an adhering metallic product and elongating a maintenance cycle and a detoxification device including the inlet nozzle. The inlet nozzle includes a portion adjacent to a combustor, that is cut (removed) in advance. Consequently, in the portion, an insulator made of a ceramic material is exposed. Since the ceramic material supplies a small number of electrons, even when the insulator is exposed to heat from the combustor to reach a high temperature, a reductive reaction is less likely to occur. Accordingly, even when a metallic exhaust gas is allowed to flow, the metallic exhaust gas is prevented from being precipitated as the metallic product and gradually deposited with time.

公开(公告)号：US20240375158A1

公开(公告)日：2024-11-14

申请号：US18688723

申请日：2022-09-21

Applicant: Edwards Japan Limited

Inventor： Katsunori Takahashi ,  Masahiro Tanaka

IPC: B08B9/043 ,  B08B1/16 ,  B08B1/30 ,  B08B1/54 ,  B08B13/00 ,  H01L21/67

Abstract: A detoxifying device of a structure wherein the deposits can be removed cleanly, without leaving residue, even for a nozzle that is provided with a narrow diameter portion and a wide diameter portion that is further to the downstream side than the narrow diameter portion, and to provide a nozzle scraper used in said detoxifying device.

公开(公告)号：US20240367201A1

公开(公告)日：2024-11-07

申请号：US18683687

申请日：2022-09-02

Applicant: Edwards Japan Limited

Inventor： Katsunori Takahashi ,  Masahiro Tanaka ,  Jinquan Guan

IPC: B08B3/02 ,  B08B13/00

Abstract: In order to efficiently remove deposited material adhering to the interior of an abatement device, an abatement device is equipped with a deposited material removing means for removing deposited material produced during abatement of exhaust gas. The deposited material removing means includes: a storage unit that stores a liquid; a gas supply unit that supplies pressurized gas to the storage unit; and a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.