公开(公告)号：US20140027411A1

公开(公告)日：2014-01-30

申请号：US14009451

申请日：2012-04-12

Applicant: Edwards Limited

Inventor： Sergey Alexandrovich Voronin ,  Christopher James Philip Clements ,  Daniel Martin McGrath ,  Fraser Gray ,  Andrew James Seeley

IPC: H05H1/34

CPC classification number: H05H1/34 ,  H05H2001/3426 ,  H05H2001/3468 ,  H05H2001/3484

Abstract: To lengthen the service period on DC plasma abatement devices a modified DC plasma torch is provided with an electrically conductive cathode and an electrically conductive anode spaced apart from one another to form a gap therebetween; a metal swirl bush at least partially located within the gap and comprising a channel adapted to permit, in use, a gas to flow through the gap; and a ceramic element interposed between any one or more of: the cathode and the swirl bush; and the anode and the swirl bush.

Abstract translation: 为了延长DC等离子体消除装置的使用期限，改进的DC等离子体焰炬设置有彼此间隔开的导电阴极和导电阳极，以在它们之间形成间隙; 至少部分地位于所述间隙内的金属涡流套管，包括适于在使用中允许气体流过所述间隙的通道; 以及插入在所述阴极和所述涡流衬套中的任一个或多个中的陶瓷元件; 和阳极和涡流衬套。