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公开(公告)号：US20240318816A1
公开(公告)日：2024-09-26
申请号：US18577906
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Andrew James Seeley
CPC classification number: F23G7/065 , B01D53/70 , F23D14/58 , B01D2257/2066 , B01D2258/0216 , F23G2209/142 , F23G2900/54402
Abstract: An inlet nozzle assembly, an abatement apparatus and a method are disclosed. The inlet nozzle assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet nozzle assembly comprises: an inlet nozzle configured to deliver the effluent stream into an abatement chamber; a head defining an aperture for receiving the inlet nozzle; and an insulating mount configured to retain the inlet nozzle within the aperture. In this way, the thermal path between the inlet nozzle and the head is interrupted by the insulating mount which helps to prevent the inlet nozzle being cooled by the head, which helps to prevent condensates gathering as powder or particulates on the inlet nozzle.
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公开(公告)号：US11982445B2
公开(公告)日：2024-05-14
申请号：US17779361
申请日：2020-11-24
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
CPC classification number: F23G7/065 , B22F1/12 , B22F3/002 , B22F3/1025 , B22F3/1103 , B22F3/1121 , B22F3/225 , B22F5/10 , B22F2998/10 , B22F2999/00 , B22F2999/00 , B22F1/00 , B22F1/062 , C22C33/0278 , B22F2998/10 , B22F1/10 , B22F3/225 , B22F3/1021 , B22F3/1121
Abstract: A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.
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公开(公告)号：US20230277974A1
公开(公告)日：2023-09-07
申请号：US18006057
申请日：2021-07-27
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Stephen Cotlle , Neil Condon , Christopher Bailey , Julian Dean , Joanne Greenwood , Zachary Dunbar
CPC classification number: B01D53/025 , B01D53/0476 , B01D53/1493 , B01D53/82 , B01D53/54 , B01D53/44 , B01D2256/18 , B01D2258/02 , B01D2257/102 , B01D2257/108 , B01D2257/2066
Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
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公开(公告)号：US20220362711A1
公开(公告)日：2022-11-17
申请号：US17763940
申请日：2020-09-23
Applicant: Edwards Limited
Inventor： Michael Colin Graham , Andrew James Seeley , Duncan Michael Price
Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.
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公开(公告)号：US10464002B2
公开(公告)日：2019-11-05
申请号：US15327419
申请日：2015-07-20
Applicant: Edwards Limited
Inventor： Andrew James Seeley
Abstract: A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. In this way, particles may be removed effectively from the fluid in the effluent stream without the need for an inconvenient electrostatic precipitator or other large particle separator. Instead, the apparatus provides for improved particle capture and removal within a smaller footprint. This provides for a more efficient and compact device.
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Patent Agency Ranking
公开(公告)号：US10203054B2
公开(公告)日：2019-02-12
申请号：US15028298
申请日：2014-10-10
Applicant: Edwards Limited
Inventor： Andrew James Seeley
IPC: F16L17/10 , F16J15/00 , F16J15/14 , F17D5/02 , F16L23/10 , F16L23/16 , F16L23/22 , G01M3/00 , G01M3/28 , F16L39/00
Abstract: A vacuum system pipe coupling includes a first coupling member and a second coupling member. The vacuum system pipe coupling has a seal system that is to be positioned to seal between the first and second coupling members and a securing system to releasably secure the first coupling member to the second coupling member. The seal system has an inner seal element and an outer seal element spaced from the inner seal element. The first coupling member is provided with a flow passage configured to conduct a pressurized gas to a space between the inner and outer seal elements to shield the outer seal element from fluid flowing through the pipe coupling in the event of failure of the inner seal element.
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公开(公告)号：US20240384869A1
公开(公告)日：2024-11-21
申请号：US18577018
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Aaron Bowen , Andrew James Seeley
IPC: F23G7/06
Abstract: An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.
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公开(公告)号：US20240310041A1
公开(公告)日：2024-09-19
申请号：US18576268
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Andrew James Seeley , David Frederick Bartz , Michael Jay Silberstein
CPC classification number: F23G7/065 , B01D53/005 , B01D2258/0216 , F23G2209/142
Abstract: A modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foraminous sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.
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公开(公告)号：US20180214812A1
公开(公告)日：2018-08-02
申请号：US15745923
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Duncan Michael Price
IPC: B01D47/10
CPC classification number: B01D47/10 , B01D53/68 , B01D53/75 , B01D53/78 , B01D2257/108 , B01D2257/2027 , B01D2257/204 , B01D2257/406 , B01D2257/553 , B01D2258/0216 , C23C16/44 , C23C16/4412 , F04C19/001 , Y02C20/30
Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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公开(公告)号：US20140027411A1
公开(公告)日：2014-01-30
申请号：US14009451
申请日：2012-04-12
Applicant: Edwards Limited
Inventor： Sergey Alexandrovich Voronin , Christopher James Philip Clements , Daniel Martin McGrath , Fraser Gray , Andrew James Seeley
IPC: H05H1/34
CPC classification number: H05H1/34 , H05H2001/3426 , H05H2001/3468 , H05H2001/3484
Abstract: To lengthen the service period on DC plasma abatement devices a modified DC plasma torch is provided with an electrically conductive cathode and an electrically conductive anode spaced apart from one another to form a gap therebetween; a metal swirl bush at least partially located within the gap and comprising a channel adapted to permit, in use, a gas to flow through the gap; and a ceramic element interposed between any one or more of: the cathode and the swirl bush; and the anode and the swirl bush.
Abstract translation: 为了延长DC等离子体消除装置的使用期限，改进的DC等离子体焰炬设置有彼此间隔开的导电阴极和导电阳极，以在它们之间形成间隙; 至少部分地位于所述间隙内的金属涡流套管，包括适于在使用中允许气体流过所述间隙的通道; 以及插入在所述阴极和所述涡流衬套中的任一个或多个中的陶瓷元件; 和阳极和涡流衬套。
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