公开(公告)号：US20220373175A1

公开(公告)日：2022-11-24

申请号：US17773745

申请日：2020-11-03

Applicant: Edwards Limited

Inventor： Duncan Michael Price ,  Michael Colin Graham

IPC: F23G7/06 ,  C23C16/44

Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.

公开(公告)号：US20220362711A1

公开(公告)日：2022-11-17

申请号：US17763940

申请日：2020-09-23

Applicant: Edwards Limited

Inventor： Michael Colin Graham ,  Andrew James Seeley ,  Duncan Michael Price

IPC: B01D53/70 ,  B01D53/34

Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.