公开(公告)号：US20240377062A1

公开(公告)日：2024-11-14

申请号：US18292162

申请日：2022-07-28

Applicant: Edwards Limited

Inventor： Gemma Haf Jones ,  Neil Andrew Maddock ,  Gareth David Stanton ,  Alageswaren Reddi Balsamy Radiar

IPC: F23G7/06 ,  F23D14/22

Abstract: An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an effluent stream from a semiconductor processing tool, the inlet head assembly comprises: an inlet head; a pilot nozzle extending within the inlet head and configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber of the abatement apparatus; and a plurality inlet nozzles, each extending within the inlet head and configured to supply an associated effluent stream for abatement within the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle. In this way, the effluent streams are packed closer together around the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss, which enables a reduction in the combustion reagents needing to be supplied.

公开(公告)号：US20230213186A1

公开(公告)日：2023-07-06

申请号：US18000598

申请日：2021-05-24

Applicant: Edwards Limited

Inventor： Gemma Haf Jones ,  Alageswaren Reddi Balsamy Radiar ,  Neil Andrew Maddock ,  Gareth David Stanton

IPC: F23G7/06 ,  F23D14/02 ,  F23D14/62

CPC classification number: F23G7/065 ,  F23D14/02 ,  F23D14/62 ,  F23D2900/14701 ,  F23G2209/142

Abstract: An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.