公开(公告)号：US20210018387A1

公开(公告)日：2021-01-21

申请号：US16603073

申请日：2018-04-04

Applicant: Edwards Limited

Inventor： Christopher Miles ,  Paul Milner ,  Richard Salloum

IPC: G01L5/00 ,  F16C41/00 ,  F04D19/04 ,  F04D29/056 ,  F04D29/64

Abstract: The invention relates to a bearing preload force gauge for indicating the bearing preload force on a turbomolecular pump rotor bearing. The gauge comprises a housing, an indicator for indicating the bearing preload force, and actuator coupled to an impeller engagement surface by a member configured to provide a resilient bias between the actuator and the impeller engagement surface. The invention also relates to a bearing preload tool and methods for measuring the bearing preload force on a turbomolecular pump.