公开(公告)号：US12285715B2

公开(公告)日：2025-04-29

申请号：US18006057

申请日：2021-07-27

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Stephen Bruce Cottle ,  Neil Condon ,  Christopher Mark Bailey ,  Julian Richard Dean ,  Joanne Rachel Greenwood ,  Zachary William Dunbar

IPC: B01D53/02 ,  B01D53/047 ,  B01D53/14 ,  B01D53/44 ,  B01D53/54 ,  B01D53/82

Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.