公开(公告)号：US20070192056A1

公开(公告)日：2007-08-16

申请号：US11307640

申请日：2006-02-15

申请人： Ejaj Ahmed ,  Charles Archie ,  Stephen Goodrich ,  Eric Solecky ,  Georgios Vakas ,  Erwin Weissmann ,  Lin Zhou

发明人： Ejaj Ahmed ,  Charles Archie ,  Stephen Goodrich ,  Eric Solecky ,  Georgios Vakas ,  Erwin Weissmann ,  Lin Zhou

IPC分类号： G06F15/00

CPC分类号： G05B19/41865 ,  G05B2219/31459 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summary of a recipes used by the tool, and adding categorization attributes to identify the summary for retrieval from the database. There is provided a desired recipe having instructions for measuring desired dimensions, including a summary of parameters relating to tool function for the feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in the database, identifying differences there between, modifying the desired recipe instructions to conform to the database instructions, verifying the desired recipe prior to using the modified desired recipe by the tool, and using the desired recipe to execute a feature measurement on the tool.

摘要翻译： 一种制备用于操作计量工具的配方的方法，每个配方包括用于测量微电子特征中的尺寸的一组指令。 数据库包括多个已知指令，其具有用于通过创建工具使用的配方的摘要来测量不同特征尺寸的最为已知的方法，并且添加分类属性以识别用于从数据库检索的摘要。 提供了具有用于测量所需尺寸的指令的期望配方，包括与要测量的特征尺寸的工具功能相关的参数的总结。 该方法包括将所需配方中的指令与数据库中的指令进行比较，识别其间的差异，修改所需配方指令以符合数据库指令，在使用工具进行修改的所需配方之前验证所需的配方;以及 使用所需的配方在工具上执行功能测量。