Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
    1.
    发明授权
    Condenser microphone having flexure hinge diaphragm and method of manufacturing the same 有权
    具有挠性铰链隔膜的冷凝器麦克风及其制造方法

    公开(公告)号:US08605920B2

    公开(公告)日:2013-12-10

    申请号:US13791039

    申请日:2013-03-08

    CPC classification number: H04R31/003 H04R19/005 H04R31/00 H04R2499/11

    Abstract: A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.

    Abstract translation: 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜,并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此,制造工艺可以提高电容传声器的灵敏度和减小尺寸。

    Telehaptic device
    6.
    发明授权

    公开(公告)号:US11749075B2

    公开(公告)日:2023-09-05

    申请号:US17513543

    申请日:2021-10-28

    CPC classification number: G08B6/00 B06B1/0629

    Abstract: Provided is a telehaptic device which includes a piezoelectric sensor module and a piezoelectric actuator module that are spaced apart from each other, wherein the piezoelectric sensor module includes a first flexible substrate, a first support substrate connected to the first flexible substrate, a piezoelectric sensor array on the first flexible substrate, and a first wireless communication circuit on the first support substrate, the piezoelectric actuator module includes a second flexible substrate, a second support substrate connected to the second flexible substrate, a piezoelectric actuator array on the second flexible substrate, and a second wireless communication circuit on the second support substrate, the piezoelectric sensor array includes piezoelectric sensors, the piezoelectric sensors being spaced apart according to a first pitch, the piezoelectric actuator array includes piezoelectric actuators, the piezoelectric actuators being spaced apart according to a second pitch, the first pitch and the second pitch are the same.

    Vibration actuator device
    7.
    发明授权

    公开(公告)号:US11618058B2

    公开(公告)日:2023-04-04

    申请号:US16213289

    申请日:2018-12-07

    Abstract: Disclosed is a vibration actuator device. The vibration actuator device includes a substrate, lower supports disposed on the substrate and spaced apart from each other in a first direction, an actuator disposed on the lower supports to generate a vibration having a first resonant frequency by an external power, a vibration plate disposed on the actuator to vibrate in accordance with the actuator, and a mass portion disposed on the vibration plate to vibrate in accordance with the actuator and the vibration plate. Here, each of the vibration plate and the mass portion has a second resonant frequency that is less than the first resonant frequency.

    Piezoelectric device including displacement amplification of scissor-hinge structure

    公开(公告)号:US11533003B2

    公开(公告)日:2022-12-20

    申请号:US17237653

    申请日:2021-04-22

    Abstract: The present disclosure relates to a piezoelectric device, and more particularly, to a piezoelectric device including: a piezoelectric actuator; a displacement transmission structure disposed on the piezoelectric actuator; and a displacement amplification structure disposed between the piezoelectric actuator and the displacement transmission structure. Here, the displacement amplification structure includes: a first displacement amplification structure and a second displacement amplification structure, which cross each other; and a fixing pin that passes through the first displacement amplification structure and the second displacement amplification structure to connect the first displacement amplification structure and the second displacement amplification structure. Also, each of one end of the first displacement amplification structure and one end of the second displacement amplification structure may be fixed on the piezoelectric actuator.

    Mapping type three-dimensional interaction apparatus and method

    公开(公告)号:US10001841B2

    公开(公告)日:2018-06-19

    申请号:US15017109

    申请日:2016-02-05

    Inventor: Hye Jin Kim

    CPC classification number: G06F3/017 G06F3/011 G06F3/04815

    Abstract: Provided are a three-dimensional (3D) interaction apparatus and method for providing a user interaction service for a 3D image. The 3D interaction apparatus includes a memory including computer-executable instructions, a processor configured to read and execute the computer-executable instructions, an action calculator configured to calculate 3D action information corresponding to an action of a user, a mapping information calculator configured to calculate a manipulation position in a coordinate system of the 3D image matching each of coordinate values of the 3D action information, based on the 3D action information and 3D information of each of features of the 3D image, and an interaction controller configured to, when an arbitrary image processing request based on an action of a user is made for the calculated manipulation position, perform a corresponding image processing operation and display a 3D image obtained through the performed image processing operation.

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