公开(公告)号：US11498852B2

公开(公告)日：2022-11-15

申请号：US16560339

申请日：2019-09-04

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Mason Spilinek ,  Tyler Yost ,  Michael Volkmar

IPC: C02F1/00 ,  C02F1/42 ,  G01N27/06 ,  G01N33/18 ,  C02F103/04

Abstract: An ultrapure water (UPW) generation and verification system can include a cleaning chemical station, a cleanup column, a conductivity verification station, and a holding reservoir, in fluid communication with one another. The cleaning chemical station can be configured to selectably permit a flow of water to pass therethrough to the cleanup column or to block the flow of water and instead deliver a cleaning chemical to the cleanup column. The conductivity verification station can be configured to selectably perform at least one of the following: permit water to flow from the cleanup column to the holding reservoir; direct fluid to waste; or test the conductivity of the water for a purity level.