公开(公告)号：US09050851B2

公开(公告)日：2015-06-09

申请号：US13952861

申请日：2013-07-29

Applicant: Environmental Process Solutions, Inc.

Inventor： Martin Boehm ,  Shaun C. Bosar ,  Robert Edward Johnston

IPC: B44C1/22 ,  B24B57/00

CPC classification number: B44C1/227 ,  B24B57/00

Abstract: A method is provided for reformulating a chemical mechanical planarization (CMP) slurry for use in conjunction with a CMP tool having an active cycle during which the tool is being used to planarize a substrate, and a rinse cycle during which the tool is being rinsed. The method comprises (a) receiving a feed stream from the CMP tool, at least a portion of the feed stream comprising abrasive particles disposed in a liquid medium; (b) during at least a portion of the rinse cycle, sending the feedstream received from the CMP tool to a first location; and (c) during at least a portion of the active cycle, sending the feedstream received from the CMP tool to a second location where the feedstream undergoes processing to reformulate the slurry.

Abstract translation: 提供了一种用于重新配制化学机械平面化（CMP）浆料的方法，该化学机械平面化（CMP）浆料与CMP工具结合使用，CMP刀具具有工具用于平坦化基材的活动循环，以及冲洗工具的漂洗循环。 该方法包括（a）从CMP工具接收进料流，所述进料流的至少一部分包含设置在液体介质中的磨料颗粒; （b）在冲洗循环的至少一部分期间，将从CMP工具接收的进料流发送到第一位置; 和（c）在活动循环的至少一部分期间，将从CMP工具接收的进料流发送到第二位置，在该第二位置，进料流经过处理以重新配制浆料。

公开(公告)号：US20130306600A1

公开(公告)日：2013-11-21

申请号：US13952861

申请日：2013-07-29

Applicant: Environmental Process Solutions, Inc.

Inventor： Martin Boehm ,  Shaun C. Bosar ,  Robert Edward Johnston

IPC: B44C1/22

CPC classification number: B44C1/227 ,  B24B57/00

Abstract: A method is provided for reformulating a chemical mechanical planarization (CMP) slurry for use in conjunction with a CMP tool having an active cycle during which the tool is being used to planarize a substrate, and a rinse cycle during which the tool is being rinsed. The method comprises (a) receiving a feed stream from the CMP tool, at least a portion of the feed stream comprising abrasive particles disposed in a liquid medium; (b) during at least a portion of the rinse cycle, sending the feedstream received from the CMP tool to a first location; and (c) during at least a portion of the active cycle, sending the feedstream received from the CMP tool to a second location where the feedstream undergoes processing to reformulate the slurry.

Abstract translation: 提供了一种用于重新配制化学机械平面化（CMP）浆料的方法，该化学机械平面化（CMP）浆料与CMP工具结合使用，CMP刀具具有工具用于平坦化基材的活动循环，以及冲洗工具的漂洗循环。 该方法包括（a）从CMP工具接收进料流，所述进料流的至少一部分包含设置在液体介质中的磨料颗粒; （b）在冲洗循环的至少一部分期间，将从CMP工具接收的进料流发送到第一位置; 和（c）在活动循环的至少一部分期间，将从CMP工具接收的进料流发送到第二位置，在该第二位置，进料流经过处理以重新配制浆料。