公开(公告)号：US20020036261A1

公开(公告)日：2002-03-28

申请号：US09905536

申请日：2001-07-13

Applicant: Epion Corporation

Inventor： Jerald P. Dykstra

IPC: H01J049/00 ,  B01D059/44

CPC classification number: H01J37/304 ,  H01J2237/0812

Abstract: The invention provides methods and apparatus for measuring the distribution of cluster ion sizes in a gas cluster ion beam (GCIB) and for determining the mass distribution and mass flow of cluster ions in a GCIB processing system without necessitating the rejection of a portion of the beam through magnetic or electrostatic mass analysis. The invention uses time-of-flight measurement to estimate or monitor cluster ion size distribution either before or during processing of a workpiece. The measured information is displayed and incorporated in automated control of a GCIB processing system.

Abstract translation: 本发明提供了用于测量气体簇离子束（GCIB）中的团簇离子尺寸分布并用于确定GCIB处理系统中的团簇离子的质量分布和质量流量的方法和装置，而不需要排除一部分束 通过磁性或静电质量分析。 本发明使用飞行时间测量在工件处理之前或处理期间估计或监测簇离子尺寸分布。 测量的信息被显示并结合在GCIB处理系统的自动控制中。