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公开(公告)号：US6159859A
公开(公告)日：2000-12-12
申请号：US93975
申请日：1998-06-09
IPC分类号： H01L21/302 , H01L21/304 , H01L21/306
CPC分类号： H01L21/02049
摘要： The present invention is a process for thermal, vapor phase removal of silicon oxides and metal-containing contaminants from a surface of a substrate of a type used in manufacturing semiconductor devices comprising contacting the substrate at an elevated temperature at an elevated temperature appropriate to generate and maintain an effective amount of a cleaning reagent to form volatile by-products of the silicon oxides and the metal-containing contaminants and removing the volatile by-products from the surface, wherein the cleaning reagent is a complex of hydrogen fluoride and an oxygen-containing compound selected from the group consisting of one or more of trifluoroacetic acid, trifluoroacetic anhydride, 1,2-propanedione, a .beta.-diketone and a .beta.-diketoimine of the formula: ##STR1##
摘要翻译： 本发明是用于从用于制造半导体器件的类型的衬底的表面热，气相去除氧化硅和含金属的污染物的方法，包括在升高的温度下使衬底接触，所述高温适于产生和 保持有效量的清洗试剂以形成氧化硅和含金属污染物的挥发性副产物，并从表面除去挥发性副产物，其中清洗试剂是氟化氢和含氧气体的络合物 选自三氟乙酸，三氟乙酸酐，1,2-丙二酮，β-二酮和下式的β-二酮亚胺中的一种或多种的化合物：
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公开(公告)号：US06648021B2
公开(公告)日：2003-11-18
申请号：US10137078
申请日：2002-05-02
申请人： Dao-Hong Zheng , John Irven , Mark Allen George
发明人： Dao-Hong Zheng , John Irven , Mark Allen George
IPC分类号： B08B9027
CPC分类号： F17C13/04 , F17C5/02 , F17C7/02 , F17C13/025 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2227/048 , F17C2270/0518 , F17D1/04 , Y10T137/0419 , Y10T137/4259 , Y10T137/87249 , Y10T137/87885
摘要： A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157). The secondary module (252) has a corresponding supporting body (254) and main flow path (255) and corresponding output connecting means (270) and corresponding input connecting means (256) for mounting the secondary module (252) on the primary module (152). The supporting body (254) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.
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公开(公告)号：US20120017841A1
公开(公告)日：2012-01-26
申请号：US12804577
申请日：2010-07-24
申请人： Antonije Andric , Mark Allen George
发明人： Antonije Andric , Mark Allen George
CPC分类号： A01K31/02
摘要： An automatic animal door having a door for closing off an entrance and a controls unit, the door having a vertical axis, a top, and a bottom, comprises means for rotating the door about a vertical axis. It is desired that the automatic animal door of the present invention rotates the door at preset times as follows: door opening at sunrise, door closing at sunset, door opening a short time thereafter, and door closing a final time in a 24 hour cycle a short time thereafter. A method of controlling the containment of birds using an automatic animal door, the automatic animal door having a door for closing off an entrance and a controls unit, comprises the step of automatically rotating the door about a vertical axis, preferably multiple times in a 24 hour period.
摘要翻译： 一种具有用于封闭入口的门和控制单元的自动动物门，门具有垂直轴，顶部和底部，包括用于围绕垂直轴旋转门的装置。 希望本发明的自动动物门在预设时间如下旋转门：日出时的门打开，日落时的门关闭，此后稍后的门打开，以及在24小时周期内关闭最后的时间 此后很短的时间。 一种使用自动动物门来控制鸟类容纳物的方法，具有用于关闭入口的门的自动动物门和控制单元包括以24°自动旋转门的方式，优选多次， 小时。
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公开(公告)号：US06527009B2
公开(公告)日：2003-03-04
申请号：US09929440
申请日：2001-08-14
申请人： Dao-Hong Zheng , John Irven , Mark Allen George
发明人： Dao-Hong Zheng , John Irven , Mark Allen George
IPC分类号： B08B9027
CPC分类号： F17C13/04 , F17C5/02 , F17C7/02 , F17C13/025 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2227/048 , F17C2270/0518 , F17D1/04 , Y10T137/0419 , Y10T137/4259 , Y10T137/87249 , Y10T137/87885
摘要： A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow. path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157). The secondary module (252) has a corresponding supporting body (254) and main flow path (255) and corresponding output connecting means (270) and corresponding input connecting means (256) for mounting the secondary module (252) on the primary module (152). The supporting body (254) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.
摘要翻译： 用于压缩气瓶（111）的模块化气体控制装置包括主模块（152）和安装在主模块上的次模块（252）。 主模块包括具有通过主体的第一主气流路径（155）的第一支撑体（154）。 支撑体具有用于将主体安装在气缸（111）上的输入连接装置（156），并且连接气体流路（155），以通过第一流量与气瓶连通。 路径（157）。 减压装置（166）以比在容器中更低的压力在流路中提供气体。 减压装置下游的输出连接装置（170）从主气流路径提供低压出口。 高压截止阀（164）位于减压装置的上游，并且填充装置（161,160）允许通过输入连接装置（156）沿着第二流动路径（159）以压缩气体填充气缸 ）与输入流路径（157）分离。 辅助模块252具有对应的支撑体254和主流路255以及相应的输出连接装置270和相应的输入连接装置256，用于将次模块252安装在主模块上 152）。 二次模块的支撑体（254）具有两个或多个功能部件的组合，其包括用于测量和/或改变第二支撑体中的气流参数和/或用于切换和/或排气和/或混合的装置 气流在第二支撑体内。
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公开(公告)号：US06314986B1
公开(公告)日：2001-11-13
申请号：US09189562
申请日：1998-11-11
申请人： Dao-Hong Zheng , John Irven , Mark Allen George
发明人： Dao-Hong Zheng , John Irven , Mark Allen George
IPC分类号： B08B9027
CPC分类号： F17C13/04 , F17C5/02 , F17C7/02 , F17C13/025 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2227/048 , F17C2270/0518 , F17D1/04 , Y10T137/0419 , Y10T137/4259 , Y10T137/87249 , Y10T137/87885
摘要： A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow path (157). Pressure reducing means (166) provides gas in the flow path at a lower pressure than in the container. Output connecting means (170) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut off valve (164) is positioned upstream of the pressure reducing means, and filling means (161, 160) allows filling of the cylinder with compressed gas through the input connecting means (156) along a second flow path (159) separate from the input flow path (157). The secondary module (252) has a corresponding supporting body (254) and main flow path (255) and corresponding output connecting means (270) and corresponding input connecting means (256) for mounting the secondary module (252) on the primary module (152). The supporting body (254) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.
摘要翻译： 用于压缩气瓶（111）的模块化气体控制装置包括主模块（152）和安装在主模块上的次模块（252）。 主模块包括具有通过主体的第一主气流路径（155）的第一支撑体（154）。 支撑体具有用于将主体安装在气缸（111）上的输入连接装置（156），并且通过第一流路（157）连接气体流路（155）与气瓶连通。 减压装置（166）以比在容器中更低的压力在流路中提供气体。 减压装置下游的输出连接装置（170）从主气流路径提供低压出口。 高压截止阀（164）位于减压装置的上游，并且填充装置（161,160）允许通过输入连接装置（156）沿着第二流动路径（159）以压缩气体填充气缸， 与输入流路径（157）分离。 辅助模块252具有对应的支撑体254和主流路255以及相应的输出连接装置270和相应的输入连接装置256，用于将次模块252安装在主模块上 152）。 二次模块的支撑体（254）具有两个或多个功能部件的组合，其包括用于测量和/或改变第二支撑体中的气流参数和/或用于切换和/或排气和/或混合的装置 气流在第二支撑体内。
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