公开(公告)号：US06657719B1

公开(公告)日：2003-12-02

申请号：US09633809

申请日：2000-08-07

申请人： Eric C. Benck

发明人： Eric C. Benck

IPC分类号： G01J3443

CPC分类号： H05H1/0043 ,  G01J3/443

摘要： A device for analyzing plasma enclosed in a chamber. The device has a lens array which has a plurality of lens array lenses. The lens array lenses are located in a position so that the line of sight for each lens array lens intersects one another at a single point in front of the lens array. Each lens array lens is also located in a position so that each lens array lens is focused near a rear wall of the chamber. Behind each lens array lens is a cable having a first end and a second end. The first end of the cable is located in a position to receive emission elements through the lens array lens. A collimating lens is located at the second end of the cable to couple the emission elements from the second end of the cable through a wavelength selective element. A recording device is located in a position to record the emission elements through the wavelength selective element.

摘要翻译： 用于分析封闭在腔室中的等离子体的装置。 该装置具有透镜阵列，该透镜阵列具有多个透镜阵列透镜。 透镜阵列透镜位于使得每个透镜阵列透镜的视线在透镜阵列前面的单个点处彼此相交的位置。 每个透镜阵列透镜也位于使得每个透镜阵列透镜聚焦在室的后壁附近的位置。 每个透镜阵列透镜后面是具有第一端和第二端的电缆。 电缆的第一端位于通过透镜阵列透镜接收发射元件的位置。 准直透镜位于电缆的第二端，以将来自电缆的第二端的发射元件通过波长选择元件耦合。 记录装置位于通过波长选择元件记录发射元件的位置。