公开(公告)号：US06643013B1

公开(公告)日：2003-11-04

申请号：US09376164

申请日：1999-08-17

申请人： Ryosuke Shimidzu ,  Thomas Nelis ,  Susumu Matsumoto

发明人： Ryosuke Shimidzu ,  Thomas Nelis ,  Susumu Matsumoto

IPC分类号： G01J3443

CPC分类号： G01N21/67

摘要： This invention provides a glow discharge emission spectroscopic analysis apparatus which is capable of making a desired chemical analysis with excellent reproducibility. A glow discharge emission spectroscopic analysis apparatus of this invention is constituted so that the sample is held by a first electrical conductor provided on one side of a glow discharge tube and a second electrical conductor is movable by a cylinder rod to secure the sample in contact with the first electrical conductor. The electrical conductors can be electrically connected with each other when the sample is secured, and a negative electric potential is applied to the electrical conductors.

摘要翻译： 本发明提供能够以优异的再现性进行期望的化学分析的辉光放电发射光谱分析装置。 本发明的辉光放电发射光谱分析装置被构成为使得样品由设置在辉光放电管一侧的第一电导体保持，并且第二电导体可通过气缸杆移动以固定样品与 第一个电导体。 当样品固定时，电导体可以彼此电连接，并且对电导体施加负电位。

公开(公告)号：US06221679B1

公开(公告)日：2001-04-24

申请号：US09064957

申请日：1998-04-23

申请人： Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

发明人： Michael Lane Smith, Jr. ,  Joel O'Don Stevenson ,  Pamela Peardon Denise Ward

IPC分类号： G01J3443

CPC分类号： G01J3/443 ,  G01J3/28 ,  G01J2003/2866

摘要： The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

摘要翻译： 本发明一般涉及等离子体工艺的各个方面，更具体地说涉及这种等离子体工艺的监测。 至少一些方面涉及校准或初始化等离子体监视组件。 这种类型的校准可以用于解决与在等离子体处理中获得的光发射数据相关联的波长偏移，强度偏移或二者。 校准光可以指向正在获得光发射数据的窗口，以确定窗口的内表面对通过其获得的光发射数据具有的效果（如果有的话），光发射数据的操作 收集设备或两者。 另一方面至少在一些方面涉及可以在处理室内运行的等离子体过程，更典型地是正在运行的等离子体方法的各种类型的评估。 通过光学排放分析进行等离子体健康评估和过程识别。 与本发明相关的另一方面涉及等离子体处理（例如，血浆配方，等离子体清洁，调理晶片操作）或其离散/可辨别部分（例如，多步骤的等离子体步骤）的终点 血浆配方）。 与本发明相关的最后一个方面涉及如何将一个或多个上述方面实现到半导体制造设施中，例如将晶片分配到晶片生产系统。

公开(公告)号：US06816255B2

公开(公告)日：2004-11-09

申请号：US10173352

申请日：2002-06-17

申请人： Adrianus Johannes Gerardus Mank ,  Peter Van De Weijer

发明人： Adrianus Johannes Gerardus Mank ,  Peter Van De Weijer

IPC分类号： G01J3443

CPC分类号： H01L51/5259

摘要： A method of leak-testing an electroluminescent device includes enclosing at least one light emitting diode (LED) including LED material in a housing of the electroluminescent device such that at least a surface portion of the LED material is in contact with atmosphere within the housing, and measuring photo-oxidation of the LED material.

摘要翻译： 一种对电致发光器件进行泄漏测试的方法包括在电致发光器件的外壳中封装包括LED材料的至少一个发光二极管（LED），使得LED材料的至少一个表面部分与外壳内的大气接触， 并测量LED材料的光氧化。

公开(公告)号：US06327889B1

公开(公告)日：2001-12-11

申请号：US09467849

申请日：1999-12-20

申请人： Michael D. Seltzer ,  Gerhard A. Meyer

发明人： Michael D. Seltzer ,  Gerhard A. Meyer

IPC分类号： G01J3443

CPC分类号： G01N1/2258 ,  G01N21/73 ,  G01N2001/2893 ,  Y10T436/100833

摘要： A convenient apparatus and method for inserting surrogate metal-entraining aerosols into exhaust stacks for the purpose of realistic dynamic testing of an emissions monitor. The aerosols contain elements required to be detected by the monitor. The 14 metals regulated by the EPA as hazardous air pollutants are of particular interest. The method requires less time and fewer skilled technicians than conventional testing methods. In a preferred embodiment of the present invention, a burner (e.g., propane or kerosene) is combined with a combustion chamber, a fan, an air compressor, at least one peristaltic pump, at least one surrogate reservoir, and the necessary ductwork for connection to an exhaust stack. The amount of surrogate aerosol to be introduced to the stack is adjusted at the peristaltic pump. After heating by the burner and subsequent introduction into the hot stack, the surrogate homogeneously mixes with the exhaust stream and is presented to the sensor as a dry gas component of the exhaust stream. Other applications include use as an exhaust stack simulator and as a standardized source of aerosols containing hazardous air pollutants, in particular metal-entraining aerosols.

摘要翻译： 一种便捷的装置和方法，用于将替代金属夹带的气溶胶插入废气堆叠中，以实现对排放监测器的现实动态测试。 气溶胶含有显示器需要检测的元素。 由EPA监管的14种金属作为危险空气污染物是特别有意义的。 该方法比常规测试方法需要更少的时间和更少的熟练技术人员。 在本发明的一个优选实施例中，燃烧器（例如丙烷或煤油）与燃烧室，风扇，空气压缩机，至少一个蠕动泵，至少一个替代容器和用于连接的必要的管道系统 到排气堆。 在蠕动泵中调节引入到堆中的替代气溶胶的量。 在通过燃烧器加热并随后引入热堆之后，替代物与废气流均匀地混合并作为排气流的干气体成分呈现给传感器。 其他应用包括用作排气烟囱模拟器和作为含有危险空气污染物，特别是金属吸附气溶胶的气溶胶的标准来源。

公开(公告)号：US06784429B2

公开(公告)日：2004-08-31

申请号：US10126098

申请日：2002-04-19

申请人： Robert De Saro ,  Arel Weisberg

发明人： Robert De Saro ,  Arel Weisberg

IPC分类号： G01J3443

CPC分类号： G01N33/206 ,  G01N21/718

摘要： Apparatus and method for in situ measurements of at least one property of a liquid contained within a vessel.

摘要翻译： 用于原位测量容器中容纳的液体的至少一种性质的装置和方法。

公开(公告)号：US06657719B1

公开(公告)日：2003-12-02

申请号：US09633809

申请日：2000-08-07

申请人： Eric C. Benck

发明人： Eric C. Benck

IPC分类号： G01J3443

CPC分类号： H05H1/0043 ,  G01J3/443

摘要： A device for analyzing plasma enclosed in a chamber. The device has a lens array which has a plurality of lens array lenses. The lens array lenses are located in a position so that the line of sight for each lens array lens intersects one another at a single point in front of the lens array. Each lens array lens is also located in a position so that each lens array lens is focused near a rear wall of the chamber. Behind each lens array lens is a cable having a first end and a second end. The first end of the cable is located in a position to receive emission elements through the lens array lens. A collimating lens is located at the second end of the cable to couple the emission elements from the second end of the cable through a wavelength selective element. A recording device is located in a position to record the emission elements through the wavelength selective element.

摘要翻译： 用于分析封闭在腔室中的等离子体的装置。 该装置具有透镜阵列，该透镜阵列具有多个透镜阵列透镜。 透镜阵列透镜位于使得每个透镜阵列透镜的视线在透镜阵列前面的单个点处彼此相交的位置。 每个透镜阵列透镜也位于使得每个透镜阵列透镜聚焦在室的后壁附近的位置。 每个透镜阵列透镜后面是具有第一端和第二端的电缆。 电缆的第一端位于通过透镜阵列透镜接收发射元件的位置。 准直透镜位于电缆的第二端，以将来自电缆的第二端的发射元件通过波长选择元件耦合。 记录装置位于通过波长选择元件记录发射元件的位置。

公开(公告)号：US06545757B1

公开(公告)日：2003-04-08

申请号：US09830055

申请日：2001-06-20

申请人： Klaus Eichardt ,  Steffen Lindner

发明人： Klaus Eichardt ,  Steffen Lindner

IPC分类号： G01J3443

CPC分类号： G01N21/74

摘要： Atomizing device for atomic absorption spectroscopy according to the Zeeman method, wherein a tubular atomizing furnace which is transversely heated via wings and with horizontally oriented furnace tube is located with its furnace wings between vertically arranged electrodes for examination of liquid specimens fed from the top and for examination of solid specimens fed from the side, and the vertically oriented atomizing furnace is located laterally between magnetic poles.

摘要翻译： 用Zeeman法进行原子吸收光谱的雾化装置，其中通过翅片横向加热并具有水平取向的炉管的管式雾化炉的炉壁位于垂直布置的电极之间，用于检查从顶部进料的液体样品， 检查从侧面进料的固体样品，垂直取向的雾化炉横向位于磁极之间。