专利检索 ap:("Evonik Degussa GmbH") AND inv:"Michael HAAS" 第 1 页

1.

发明申请
TARGETED PRODUCTION OF 2,2,3,3-TETRASILYL TETRASILANE 审中-公开

公开(公告)号：US20190127229A1

公开(公告)日：2019-05-02

申请号：US16089921

申请日：2017-03-28

申请人： Evonik Degussa GmbH

发明人： Harald STUEGER , Michael HAAS , Viktor-Stavros CHRISTOPOULOS , Odo WUNNICKE

IPC分类号： C01B33/04 , C09D1/00

摘要： The present invention provides the octasilane 2,2,3,3-tetrasilyltetrasilane 1, compositions comprising one or more additional constituents that are not 1 as well as 2,2,3,3-tetrasilyltetrasilane 1, processes for preparing 2,2,3,3-tetrasilyltetrasilane 1 and mixtures of higher hydridosilanes that include 1. The present invention further provides for the use of 1 and mixtures of higher hydridosilanes including 1 for deposition of silicon-containing material.