公开(公告)号：US20250104958A1

公开(公告)日：2025-03-27

申请号：US18472943

申请日：2023-09-22

Applicant: FEI Company

Inventor： Bert Freitag ,  Erik Kieft

IPC: H01J37/04

Abstract: In some embodiments, a scientific instrument includes an electron-beam column configured to scan an electron beam across a sample. The electron-beam column includes a beam blanker configured to gate the electron beam in response to a drive signal. The scientific instrument also includes an electron detector configured to measure a flux of transmitted or scattered electrons having interacted with the sample and an electronic controller configured to acquire an image of the sample using values of the flux measured with the electron detector for a plurality of electron-beam scan locations. The electronic controller is further configured to cause the drive signal to have a gating frequency at which the image has a moiré pattern therein.

公开(公告)号：US20230005710A1

公开(公告)日：2023-01-05

申请号：US17853727

申请日：2022-06-29

Applicant: FEI Company

Inventor： Maarten Bischoff ,  Bert Freitag

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/26

Abstract: The disclosure relates to a method for examining a sample in a scanning transmission charged particle microscope. The method comprises the steps of providing a scanning transmission charged particle microscope, having an illuminator and a scanning unit. The method comprises the steps of providing a desired dose for at least a first sample location of the plurality of sample locations; and determining, using a controller of the microscope, a first set of parameter settings for the illuminator and the scanning unit for substantially achieving the desired dose at the first sample location.