公开(公告)号：US12020895B2

公开(公告)日：2024-06-25

申请号：US17666385

申请日：2022-02-07

申请人： FEI Company

发明人： Jakub Kuba ,  John M. Mitchels ,  Jakub Drahotský ,  Michal Valík

IPC分类号： H01J37/18 ,  H01J37/28 ,  G01N1/42

CPC分类号： H01J37/185 ,  H01J37/28 ,  G01N1/42 ,  H01J2237/184 ,  H01J2237/186

摘要： Various approaches are provided for contamination-free vacuum transfer of samples. As one example, an apparatus includes a compartment configured to store multiple samples held by a cartridge removably coupled to the compartment, a sample port for transferring the cartridge between a charged particle system and a position within the compartment, and a valve configured to seal the compartment at vacuum pressure during transport of the multiple samples between charged particle systems. In this way, samples such as lamellae may be transferred between charged particle systems while maintaining the samples at vacuum pressure, thereby reducing the possibility of sample contamination during sample transfer.

公开(公告)号：US20230253176A1

公开(公告)日：2023-08-10

申请号：US17666385

申请日：2022-02-07

申请人： FEI Company

发明人： Jakub Kuba ,  John M. Mitchels ,  Jakub Drahotský ,  Michal Valík

IPC分类号： H01J37/18 ,  H01J37/28

CPC分类号： H01J37/185 ,  H01J37/28 ,  H01J2237/184 ,  H01J2237/186 ,  G01N1/42

摘要： Various approaches are provided for contamination-free vacuum transfer of samples. As one example, an apparatus includes a compartment configured to store multiple samples held by a cartridge removably coupled to the compartment, a sample port for transferring the cartridge between a charged particle system and a position within the compartment, and a valve configured to seal the compartment at vacuum pressure during transport of the multiple samples between charged particle systems. In this way, samples such as lamellae may be transferred between charged particle systems while maintaining the samples at vacuum pressure, thereby reducing the possibility of sample contamination during sample transfer.