-
公开(公告)号：US10825647B2
公开(公告)日：2020-11-03
申请号：US16255210
申请日：2019-01-23
申请人： FEI Company
摘要： A method of using a Transmission Charged Particle Microscope, comprising: Providing a specimen on a specimen holder; Using an illumination system to direct a beam of charged particles from a source onto said specimen; Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector, further comprising the following actions: In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame; In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.
-
公开(公告)号：US10122946B2
公开(公告)日：2018-11-06
申请号：US15218465
申请日：2016-07-25
申请人： FEI Company
IPC分类号： H04N5/349 , G06T3/40 , H01L27/146 , H04N5/378 , G01T1/24
摘要： When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.
-
公开(公告)号：US10389955B2
公开(公告)日：2019-08-20
申请号：US16180242
申请日：2018-11-05
申请人： FEI Company
IPC分类号： G01T1/24 , G06T3/40 , H04N5/349 , H04N5/378 , H01L27/146
摘要： When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.
-
公开(公告)号：US20170134674A1
公开(公告)日：2017-05-11
申请号：US15218465
申请日：2016-07-25
申请人： FEI Company
IPC分类号： H04N5/349 , G06T3/40 , H01L27/146 , H04N5/378
CPC分类号： H04N5/349 , G01T1/247 , G06T3/4069 , H01L27/14659 , H04N5/378
摘要： When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.
-
公开(公告)号：US20190075258A1
公开(公告)日：2019-03-07
申请号：US16180242
申请日：2018-11-05
申请人： FEI Company
IPC分类号： H04N5/349 , G01T1/24 , H04N5/378 , G06T3/40 , H01L27/146
CPC分类号： H04N5/349 , G01T1/247 , G06T3/4069 , H01L27/14659 , H04N5/378
摘要： When detecting particulate radiation, such as electrons, with a pixelated detector, a cloud of electron/hole pairs is formed in the detector. Using the signal caused by this cloud of electron/hole pairs, a position of the impact is estimated. When the size of the cloud is comparable to the pixel size, or much smaller, the estimated position shows a strong bias to the center of the pixel and the corners, as well to the middle of the borders. This hinders forming an image with super-resolution. By shifting the position or by attributing the electron to several sub-pixels this bias can be countered, resulting in a more truthful representation.
-
-
-
-
搜索结果
5 条记录 (耗时 0.009 秒)
