公开(公告)号：US20250069844A1

公开(公告)日：2025-02-27

申请号：US18456048

申请日：2023-08-25

Applicant: FEI Company

Inventor： Petr Hlavenka ,  Eva Štastná ,  Vojtech Mahel ,  Jakub Klus ,  Branislav Straka

IPC: H01J37/244 ,  H01J37/28

Abstract: Systems, components, and methods for detecting characteristic signals are described. A detector includes a detector cell. The detector cell can be configured to generate an electrical signal in response to a particle incident on an active layer of the detector cell, The active layer can define an absorption surface. The detector can include a filter. The filter can include a membrane of carbon material. The filter can be disposed relative to the detector cell to shield the absorption surface from a subset of the incident particles. The subset of the incident particles can include electrons, ions, and photons. The photons can have an energy less than about 40 eV.