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公开(公告)号:US20250017209A1
公开(公告)日:2025-01-16
申请号:US18890032
申请日:2024-09-19
Applicant: FUJIFILM Corporation
Inventor: Tadashi INABA , Naotsugu Muro , Tetsuya Kamimura , Naoko Ouchi
IPC: A01N43/80 , A01N25/02 , A01N31/08 , A01N33/12 , A01N37/06 , A01N37/16 , A01N41/06 , A01N43/16 , A01N47/44 , B24B37/04 , C11D7/26 , C11D7/32 , C11D7/34 , C11D7/36 , H01L21/02 , H01L21/306
Abstract: The present invention provides a composition that suppresses the occurrence of defects in an object to be applied, even in a case of being used after a predetermined period of time has elapsed from the production. In addition, the present invention provides a manufacturing method for a semiconductor element and a cleaning method for a semiconductor substrate.
The composition according to the present invention is a composition containing an antibacterial agent, an organic acid, an organic amine, and water, in which a content of the water is 70% by mass or more with respect to a total mass of the composition, and a pH at 25° C. is 4.0 to 9.0.