公开(公告)号：US20130189882A1

公开(公告)日：2013-07-25

申请号：US13741188

申请日：2013-01-14

申请人： FUJITSU SEMICONDUCTOR LIMITED

发明人： Kasuyoshi ARIMURA ,  Akihiko ONO ,  Masashi ISHIDA

IPC分类号： H01H85/055

CPC分类号： H01H85/055 ,  H01H85/0039 ,  H01H85/46 ,  H01L23/5256 ,  H01L23/5258 ,  H01L2924/0002 ,  H01L2924/00

摘要： An electric fuse includes a conductive material formed on a top surface of an insulating material. The conductive material includes a wiring portion, and first and second terminal portions arranged in two ends of the wiring portion so that the wiring portion is located between the first and second terminal portions. The first terminal portion, the wiring portion, and the second terminal portion are lined up in a first direction. The first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction. The electric fuse includes a film including an opening which exposes a region between the first terminal portion and the second terminal portion. The film is formed above at least a part of the wiring portion and has a tensile stress.

摘要翻译： 电熔丝包括形成在绝缘材料的顶表面上的导电材料。 导电材料包括布线部分，布置在布线部分两端的第一和第二端子部分，使得布线部分位于第一和第二端子部分之间。 第一端子部分，布线部分和第二端子部分沿第一方向排列。 第一端子部分和第二端子部分在垂直于第一方向的第二方向上的宽度大于布线部分的宽度。 电熔丝包括膜，该膜包括露出第一端子部分和第二端子部分之间的区域的开口。 膜形成在布线部的至少一部分上方并具有拉伸应力。