OPTICAL SEMICONDUCTOR DEVICE, OPTICAL INTEGRATED DEVICE, AND MANUFACTURING METHOD FOR OPTICAL SEMICONDUCTOR DEVICE

    公开(公告)号:US20240388065A1

    公开(公告)日:2024-11-21

    申请号:US18785788

    申请日:2024-07-26

    Abstract: An optical semiconductor device includes: a substrate having a (100) face as a surface; a first protrusion protruding from the substrate in a first direction and including a first mesa having a laminate structure in which a plurality of semiconductor layers are layered on the surface in the first direction, the first mesa including an active layer as one of the semiconductor layers; and a second protrusion protruding from the substrate in the first direction at a position distance from the first protrusion in a second direction intersecting with the first direction, and the second protrusion having a laminate structure in which a plurality of semiconductor layers are layered on the surface in the first direction. An end face in the first direction of the second protrusion has a substantially polygonal shape, and each side of the end face is non-parallel to a virtual line extending in [0-11] direction.

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