公开(公告)号：US20130112288A1

公开(公告)日：2013-05-09

申请号：US13667479

申请日：2012-11-02

Applicant: First Solar, Inc.

Inventor： Litian Liu ,  Erel Milshtein ,  Ulrich A. Bonne ,  Valentin Gefter ,  Roger Malik ,  Raffi Garabedian

IPC: F16L53/00

CPC classification number: C23C14/243 ,  Y10T137/6416

Abstract: A system and method employing a heater-orifice may be used to heat a flow path and to control the supply of vapor from a vaporizable material to an object. Variable or constant diameter heating rods may be used to apply heat to a flow path in order to control the supply of vapor from a vaporizable material. A baffle plate may be used to control the vapor pressure and vapor flow from a vessel containing a vaporizable material. The heater-orifice, heating rods, and baffle plate may be used alone or in combination with one another to control the flow of vaporizable material.

Abstract translation: 可以使用采用加热器孔的系统和方法来加热流路并控制从可汽化材料到物体的蒸汽供应。 可变的或恒定的直径的加热棒可用于向流动路径施加热量，以便控制来自可汽化材料的蒸气的供应。 挡板可用于控制来自含有可汽化材料的容器的蒸气压和蒸气流。 加热器孔，加热棒和挡板可以单独使用或彼此组合使用以控制可汽化材料的流动。