公开(公告)号：US20130095577A1

公开(公告)日：2013-04-18

申请号：US13645000

申请日：2012-10-04

Applicant: FIRST SOLAR, INC.

Inventor： Erel Milshtein

IPC: G01B11/06 ,  H01L21/02

CPC classification number: G01B11/0683 ,  C23C16/45525 ,  C23C16/52 ,  G01B11/0625 ,  H01L21/0262 ,  H01L22/12 ,  H01L22/26 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/541 ,  Y02E10/543

Abstract: Described herein is a method and apparatus for measuring the thickness of a deposited semiconductor material. A colorimeter has an optical source that illuminates a portion of a deposited semiconductor material with optical radiation, a sensor that collects and measures color information related to reflected radiation from the deposited semiconductor material, and a processor that receives the color information related to the reflected radiation from the sensor and calculates a thickness of the semiconductor material. The processor may control a semiconductor material deposition apparatus.

Abstract translation: 这里描述了一种用于测量沉积的半导体材料的厚度的方法和装置。 色度计具有用光辐射照射沉积的半导体材料的一部分的光源，收集并测量与来自沉积的半导体材料的反射辐射相关的颜色信息的传感器，以及接收与反射辐射有关的颜色信息的处理器 并且计算半导体材料的厚度。 处理器可以控制半导体材料沉积设备。

公开(公告)号：US08982362B2

公开(公告)日：2015-03-17

申请号：US13645000

申请日：2012-10-04

Applicant: First Solar, Inc.

Inventor： Erel Milshtein

IPC: G01B11/28 ,  G01N21/86 ,  G01V8/00 ,  G01B11/06 ,  H01L21/02 ,  H01L21/66 ,  C23C16/455 ,  C23C16/52 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18

CPC classification number: G01B11/0683 ,  C23C16/45525 ,  C23C16/52 ,  G01B11/0625 ,  H01L21/0262 ,  H01L22/12 ,  H01L22/26 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/541 ,  Y02E10/543

Abstract: Described herein is a method and apparatus for measuring the thickness of a deposited semiconductor material. A colorimeter has an optical source that illuminates a portion of a deposited semiconductor material with optical radiation, a sensor that collects and measures color information related to reflected radiation from the deposited semiconductor material, and a processor that receives the color information related to the reflected radiation from the sensor and calculates a thickness of the semiconductor material. The processor may control a semiconductor material deposition apparatus.

Abstract translation: 这里描述了一种用于测量沉积的半导体材料的厚度的方法和装置。 色度计具有用光辐射照射沉积的半导体材料的一部分的光源，收集并测量与来自沉积的半导体材料的反射辐射相关的颜色信息的传感器，以及接收与反射辐射有关的颜色信息的处理器 并且计算半导体材料的厚度。 处理器可以控制半导体材料沉积设备。

公开(公告)号：US09383316B2

公开(公告)日：2016-07-05

申请号：US14140687

申请日：2013-12-26

Applicant: First Solar, Inc.

Inventor： Markus E. Beck ,  Ulrich A. Bonne ,  Raffi Garabedian ,  Erel Milshtein ,  Ming Lun Yu

IPC: C23C14/54 ,  C23C16/52 ,  G01N21/59 ,  G01N21/31 ,  G01N21/39

CPC classification number: G01N21/5907 ,  C23C14/544 ,  G01N21/3103 ,  G01N21/39 ,  G01N2021/399

Abstract: A method of measuring vapor flux density including directing a light beam through a vapor flux to a pixel array sensor and using the pixel array sensor to measure attenuation of the light beam.

Abstract translation: 一种测量蒸汽通量密度的方法，包括将光束通过蒸气通量引导到像素阵列传感器，并使用像素阵列传感器来测量光束的衰减。

公开(公告)号：US20130112288A1

公开(公告)日：2013-05-09

申请号：US13667479

申请日：2012-11-02

Applicant: First Solar, Inc.

Inventor： Litian Liu ,  Erel Milshtein ,  Ulrich A. Bonne ,  Valentin Gefter ,  Roger Malik ,  Raffi Garabedian

IPC: F16L53/00

CPC classification number: C23C14/243 ,  Y10T137/6416

Abstract: A system and method employing a heater-orifice may be used to heat a flow path and to control the supply of vapor from a vaporizable material to an object. Variable or constant diameter heating rods may be used to apply heat to a flow path in order to control the supply of vapor from a vaporizable material. A baffle plate may be used to control the vapor pressure and vapor flow from a vessel containing a vaporizable material. The heater-orifice, heating rods, and baffle plate may be used alone or in combination with one another to control the flow of vaporizable material.

Abstract translation: 可以使用采用加热器孔的系统和方法来加热流路并控制从可汽化材料到物体的蒸汽供应。 可变的或恒定的直径的加热棒可用于向流动路径施加热量，以便控制来自可汽化材料的蒸气的供应。 挡板可用于控制来自含有可汽化材料的容器的蒸气压和蒸气流。 加热器孔，加热棒和挡板可以单独使用或彼此组合使用以控制可汽化材料的流动。