公开(公告)号：US20250067799A1

公开(公告)日：2025-02-27

申请号：US18948055

申请日：2024-11-14

Applicant: FormFactor, Inc.

Inventor： Jörg Hertwig ,  Benedikt Marx

IPC: G01R31/28 ,  G01R1/067

Abstract: Probe systems and methods of operating probe systems. The probe systems include a chuck that defines a support surface. The probe systems also include a cover plate. The probe systems further include a probe positioner that includes a positioner base, a manipulator that extends from the positioner base, and a probe arm that extends from the manipulator. The probe systems also include a probe operatively attached to the probe arm and a positioner attachment structure that separably attaches the positioner base to the cover plate. The positioner attachment structure includes an attachment structure body that defines a positioner base-facing side and a cover plate-facing side. The positioner attachment structure also includes an adhesive material that adheres the positioner base-facing side to the positioner base. The cover plate-facing side of the attachment structure body defines a micropatterned dry adhesive that separably attaches the attachment structure body to the cover plate.