公开(公告)号：US20040201392A1

公开(公告)日：2004-10-14

申请号：US10411179

申请日：2003-04-10

Applicant: FormFactor, Inc.

Inventor： Tae Ma Kim ,  Bunsaku Nagai

IPC: G01R031/02

CPC classification number: G01R1/06744 ,  G01R1/06794 ,  G01R3/00 ,  G01R31/2891

Abstract: An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner of one of the tips. An array of probes may be formed to have such alignment features.

Abstract translation: 搜索探针阵列的图像以获得对准特征。 然后将对准特征用于使接触目标和探针彼此接触。 对准特征可以是探针的一个或多个尖端的特征。 例如，这样的特征可以是其中一个提示的一角。 可以形成探针阵列以具有这样的对准特征。