公开(公告)号：US06330971B1

公开(公告)日：2001-12-18

申请号：US09677909

申请日：2000-10-03

申请人： Frank Robert Mabry ,  James Scott Rhodes

发明人： Frank Robert Mabry ,  James Scott Rhodes

IPC分类号： G06K1500

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G06K2017/0045 ,  H01L21/67276

摘要： A system and method for tracking semiconductor wafers through processing operations performed at a plurality of stations. A reader reads information relating to and identifying the wafers from a tag mounted on a wafer carrier. The tag has a memory which includes a plurality of pages storing the information. A plurality of antennas are connected to the reader. The antennas each have a transmission range which defines a reader position and the reader and tag communicate by radio frequency signals via one of the antennas when the carrier is at the respective reader position. A host computer and reader communicate in accordance with an interface protocol by which the host computer commands the reader to read the stored information from one or more selected tag pages and the reader provides the stored information read from the selected tag pages to the host computer.

摘要翻译： 一种用于通过在多个站处执行的处理操作来跟踪半导体晶片的系统和方法。 读取器从安装在晶片载体上的标签读取与晶片相关并识别的信息。 标签具有存储信息的多个页面的存储器。 多个天线连接到读取器。 每个天线具有限定读取器位置的传输范围，并且当载体处于相应的读取器位置时，读取器和标签通过射频信号经由天线之一进行通信。 主计算机和读取器根据接口协议进行通信，主机命令读取器从一个或多个所选标签页读取所存储的信息，并且读取器将从所选标签页读取的存储信息提供给主机。