公开(公告)号：USRE44007E1

公开(公告)日：2013-02-19

申请号：US11520061

申请日：2001-06-08

Applicant: Frederic Ferrieu

Inventor： Frederic Ferrieu

IPC: G01J3/28

CPC classification number: G01J4/00 ,  G01N21/211

Abstract: A spectroscopic ellipsometer comprising a light source (1) emitting a light beam, a polarizer (2) placed on the path of the light beam emitted by the light source, a sample support (9) receiving the light beam output from the polarizer, a polarization analyzer (3) for passing the beam reflected by the sample to be analyzed, a detection assembly which receives the beam from the analyzer and which comprises a monochromator (5) and a photodetector (4), and signal processor means (6) for processing the signal output from said detection assembly, and including counting electronics (13). Cooling means (12) keep the detection assembly at a temperature below ambient temperature, thereby minimizing detector noise so as to remain permanently under minimum photon noise conditions. It is shown that the optimum condition for ellipsometric measurement is obtained by minimizing all of the sources of noise (lamps, detection, ambient).

公开(公告)号：US20090019921A1

公开(公告)日：2009-01-22

申请号：US11919874

申请日：2006-04-28

Applicant: Gurvan Simon ,  Frederic Ferrieu

Inventor： Gurvan Simon ,  Frederic Ferrieu

IPC: G01N15/08

CPC classification number: G01N21/211 ,  G01N15/088 ,  G01N2015/0846

Abstract: The method for measuring the porosity of an element is performed by means of a measuring device comprising a measuring chamber in which the element is disposed, a solvent tank associated with an adsorption valve, and a pump associated with a desorption valve. The measuring method comprises measurement of the pressure in the chamber by means of a pressure sensor, and a cycle for measuring the porosity by ellipsometry at different predetermined pressure. During this measuring cycle, a pressure controller controls opening of the adsorption and desorption valves according to the measured pressure. The relative pressure in the chamber is successively regulated at different predetermined values, while maintaining a continuous flow of solvent in the chamber between the tank and the pump.

公开(公告)号：US20070171420A1

公开(公告)日：2007-07-26

申请号：US11614673

申请日：2006-12-21

Applicant: Frederic Ferrieu

Inventor： Frederic Ferrieu

IPC: G01J4/00

CPC classification number: G01B11/0641 ,  G01N21/211

Abstract: An ellipsometry device includes a first pulsed source, and optical elements for generating polarization and/or phase and detection of polarization or analysis. A signal detector detects the generated pulses. A controller is coupled to the signal detector for generating feedback pulses or control pulses to the optical elements. The controller is also coupled to the signal detector.

Abstract translation: 椭圆测量装置包括第一脉冲源和用于产生偏振和/或相位的光学元件以及偏振或分析的检测。 信号检测器检测所产生的脉冲。 控制器耦合到信号检测器，用于产生对光学元件的反馈脉冲或控制脉冲。 控制器还耦合到信号检测器。