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公开(公告)号：US06751377B2
公开(公告)日：2004-06-15
申请号：US09861840
申请日：2001-05-21
IPC分类号： G02B642
CPC分类号： G02B6/12007 , G02B6/3502 , G02B6/3536 , G02B6/357 , G02B6/3596 , G02F1/0118 , G02F2201/063 , G02F2201/16 , G02F2203/15 , G02F2203/585
摘要： In accordance with the invention, a tunable, reconfigurable optical add-drop filter comprises a pair of optical waveguides optically coupled by a microring or microdisk resonator wherein the coupling distance between the resonator and at least one of the waveguides is micromechanically controllable. With this arrangement, the degree of coupling can be tuned after fabrication to provide high level extinction of dropped wavelengths and the filter can be dynamically reconfigured. Advantageously, laser radiation is provided to tune the resonant wavelength.
摘要翻译： 根据本发明，可调谐可重构的光分插滤波器包括由微环谐振器或微盘谐振器光学耦合的一对光波导，其中谐振器与至少一个波导之间的耦合距离是微机械可控的。 通过这种布置，可以在制造之后调整耦合度，以提供掉落波长的高电平消光，并且可以动态地重新配置滤波器。 有利地，提供激光辐射以调谐谐振波长。
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公开(公告)号：US07149378B2
公开(公告)日：2006-12-12
申请号：US10746566
申请日：2003-12-24
CPC分类号： G02B6/29395 , G02B6/12007 , G02B6/12019 , G02B6/122 , G02B6/2861 , G02B6/29349 , G02B6/29352 , G02B6/3516 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B2006/12104 , G02B2006/12145 , G02B2006/12147 , G02B2006/12159
摘要： A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
摘要翻译： 公开了一种单片波导/ MEMS开关，其具有制造在单个衬底（例如绝缘体上硅晶片）上的波导部分和MEMS镜部分。 单片波导/ MEMS开关通过改变一个或多个可移动反射镜的位置来调节光信号的相位。 反射镜部分包括具有反射表面的反射镜，该反射表面附接到至少一个MEMS致动器以实现反射镜的平面内运动（平行于所述至少一个波导的平面移动）。 在一个实现中，MEMS致动器被实现为已知的梳状驱动致动器。 本发明的相位调整技术可以用在各种光学装置中，包括支持多个光通道的波长选择光开关。
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公开(公告)号：US07155083B2
公开(公告)日：2006-12-26
申请号：US11478189
申请日：2006-06-29
CPC分类号： G02B6/29395 , G02B6/12007 , G02B6/12019 , G02B6/122 , G02B6/2861 , G02B6/29349 , G02B6/29352 , G02B6/3516 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B2006/12104 , G02B2006/12145 , G02B2006/12147 , G02B2006/12159
摘要： A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
摘要翻译： 公开了一种单片波导/ MEMS开关，其具有制造在单个衬底（例如绝缘体上硅晶片）上的波导部分和MEMS镜部分。 单片波导/ MEMS开关通过改变一个或多个可移动反射镜的位置来调节光信号的相位。 反射镜部分包括具有反射表面的反射镜，该反射表面附接到至少一个MEMS致动器以实现反射镜的平面内运动（平行于所述至少一个波导的平面移动）。 在一个实现中，MEMS致动器被实现为已知的梳状驱动致动器。 本发明的相位调整技术可以用在各种光学装置中，包括支持多个光通道的波长选择光开关。
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