公开(公告)号：US4162367A

公开(公告)日：1979-07-24

申请号：US923384

申请日：1978-07-10

申请人： Friedrich Ticak ,  Hans Stut

发明人： Friedrich Ticak ,  Hans Stut

IPC分类号： C30B13/20 ,  C30B13/28 ,  C30B13/30 ,  H01L21/208 ,  H05B5/08 ,  B01J17/08

CPC分类号： C30B13/30 ,  Y10T117/1008

摘要： Method of crucible-free zone-melting a semiconductor rod which includes monitoring a melting zone formed in and traveling through a semiconductor rod surrounded by an induction heating coil, producing a respective signal corresponding to values of the actual diameters d of the semiconductor rod at a crystallization interface of the melting zone, comparing the signals corresponding to the actual diameter values d with a signal corresponding to a nominal diameter value d.sub.s so as to produce a signal corresponding to a respective first control deviation .DELTA.d, continuously combining the signals corresponding to the actual diameter values d and the signal corresponding to the respective first control deviation .DELTA.d to form respective signals corresponding to a new nominal diameter value d.sub.s *, respectively, in accordance with the relationships:(a) d.sub.s *=k.multidot.d.sub.s .+-..DELTA.d,wherein(b) 0.3 .ltoreq.k.ltoreq.1.4,and k= a constant,comparing the respective signals corresonding to the new nominal diameter value d.sub.s * to respective signals corresponding to an actual diameter value d.sub.s * of the melting zone in a given substantially horizontal cross section thereof located between a melting interface and a maximal, substantially horizontal cross section of the melting zone and having a fixed spacing from at least one of said induction heating coil and said melting interface so as to produce a signal corresponding to a respective second control deviation .DELTA.d*, and controlling with the signal corresponding to the respective second control Deviation .DELTA.d* an operating parameter having an effect upon the geometry of the melting zone so as to adjust the respective actual diameter value d.sub.i * to the nominal diameter value.

摘要翻译： 一种无坩埚区熔融半导体棒的方法，包括监测在感应加热线圈包围的半导体棒中形成的和通过半导体棒行进的熔融区，产生对应于半导体棒的实际直径d的值的相应信号 熔融区的结晶界面，将对应于实际直径值d的信号与对应于标称直径值ds的信号进行比较，以产生对应于相应的第一控制偏差DELTA d的信号，连续地组合对应于 实际直径值d和对应于相应的第一控制偏差DELTA d的信号，以分别根据以下关系形成对应于新的标称直径值ds *的相应信号：