公开(公告)号：US20250036107A1

公开(公告)日：2025-01-30

申请号：US18756329

申请日：2024-06-27

Applicant: Fujikoshi Machinery Corp.

Inventor： Tomohito Nakazawa

IPC: G05B19/418 ,  G06F21/60

Abstract: A control device for controlling operations of semiconductor wafer production devices for each of target wafers includes a storage unit, a command data generation unit, a reception data generation unit, and a communication unit, the command data generation unit associates transmission destination address with an operation recipe to generate command data representing an operation condition of one semiconductor wafer production device which is to operate or in operation, and the reception data generation unit obtains log data at a predetermined time interval from the semiconductor wafer production device via the communication unit, associate the log data with second steps of log items in series to generate reception data representing an operation state of the semiconductor wafer production device in operation or a wafer state.