公开(公告)号：US4469424A

公开(公告)日：1984-09-04

申请号：US396073

申请日：1982-07-07

申请人： Fumio Matsui ,  Mitsuaki Sashida ,  Toshihiro Komaki ,  Atsushi Yoshizawa

发明人： Fumio Matsui ,  Mitsuaki Sashida ,  Toshihiro Komaki ,  Atsushi Yoshizawa

IPC分类号： G03F7/30 ,  G03D3/06

CPC分类号： G03F7/3028

摘要： Disclosed is a method and a system for developing a photo-resist material of an optical recording medium on which digital information is recorded in the form of a series of pits whose position and length represent the digital information. In order to precisely control the size of the pits formed during the developing process, and to reduce the deviation from one recording medium to another, a monitoring beam is applied on the recording medium during the developing process. A diffraction beam of the monitoring energy beam passes through the pits, and is received by a sensor means which monitors the intensity of the diffraction beam and which produces a signal for controlling the supply of developing solution on the recording medium.

摘要翻译： 公开了一种用于显影光记录介质的光刻胶材料的方法和系统，其上以一系列凹坑的形式记录数字信息，其位置和长度表示数字信息。 为了精确地控制在显影过程中形成的凹坑的尺寸，并且减少从一个记录介质到另一记录介质的偏差，在显影过程中将监控光束施加在记录介质上。 监测能量束的衍射光束通过凹坑，并由传感器装置接收，该传感器装置监测衍射光束的强度并产生用于控制在记录介质上提供显影液的信号。

公开(公告)号：US4501480A

公开(公告)日：1985-02-26

申请号：US434478

申请日：1982-10-15

申请人： Fumio Matsui ,  Mitsuaki Sashida

发明人： Fumio Matsui ,  Mitsuaki Sashida

IPC分类号： G03F7/16 ,  G03F7/26 ,  G03F7/30 ,  G03D5/04

CPC分类号： G03F7/3028

摘要： A system for developing a photo-resist material of an optical recording medium on which digital information is recorded in the form of a series of pits whose position and length represent the digital information. In order to precisely control the size of the pits formed during the developing process, a diffraction beam of the monitoring energy beam passing through the pits is received by a sensor means which monitors the intensity of the diffraction beam and which produces a signal for controlling the supply of developing solution on the recording medium. A partition means is provided for isolating the path of the monitoring energy beam so as to eliminate absorption, diffraction or scattering effects due to the particles of developing solution sprayed on the surface of the recording medium.

摘要翻译： 一种用于显影光学记录介质的光刻胶材料的系统，其上以一系列凹坑的形式记录数字信息，其位置和长度表示数字信息。 为了精确地控制在显影过程中形成的凹坑的尺寸，通过凹坑的监测能量束的衍射光束由传感器装置接收，该传感器装置监测衍射光束的强度，并产生用于控制 在记录介质上提供显影液。 提供隔离装置用于隔离监测能量束的路径，从而消除由于喷射在记录介质表面上的显影液颗粒引起的吸收，衍射或散射效应。