公开(公告)号：US4792763A

公开(公告)日：1988-12-20

申请号：US72672

申请日：1987-07-13

Applicant: G/u/ nther Haas

Inventor： G/u/ nther Haas

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: A hot cathode ionization gauge with which neutral gas densities in the ra 10.sup.17 to 10.sup.21 m.sup.-3 can be measured, in particular under the conditions typical of fusion-orientated plasma experiments (magnetic field strength from 0 to more than 3 tesla, magnetic field direction varying by up to +/-20 degrees or more and strong plasma-induced noise background), and which is of robust design, reliable in operation and very compact and has a high sensitivity which depends in a reproducible manner on the magnetic field strength and is independent, in a certain degree which is predetermined and can be influenced by the construction, of the field direction and, within a wide range, of the gas density comprises the following electrodes arranged in mutually spaced relationship in the stated order along an axis: a cathode consisting of a tungsten wire at least 0.5 mm thick and which has a middle, active portion, a plane control electrode of diaphragm form arranged at a close distance from and parallel to the active portion of the cathode and having an elongated opening with which the active portion of the cathode is in alignment, a plane accelerating electrode arranged at a distance from and parallel to the control electrode and having a series of parallel slit-shaped apertures extending perpendicularly to the longitudinal direction of the active cathode portion, and a plane, plate-shaped ion collector electrode parallel to the control electrode.

Abstract translation: 特别是在熔融取向等离子体实验的典型条件（0至3特斯拉的磁场强度，磁场方向变化）的条件下，可以测量中性气体浓度在1017至1021m-3范围内的热阴极电离计 高达+/- 20度以上和强烈的等离子体引起的噪声背景），其设计坚固，操作可靠，结构紧凑，灵敏度高，可以以可重现的方式取决于磁场强度，是 独立的，一定程度上预定的并且可以受到构造的影响，并且在大范围内的气体密度包括沿着轴以相互间隔的关系布置的以下电极：a 阴极由至少0.5mm厚的钨丝组成，并且具有中间有源部分，隔离片形式的平面控制电极，其布置在距离并且平行 到阴极的有源部分并且具有阴极的有源部分对准的细长开口，平面加速电极，其设置在与控制电极相距一定距离处并且具有一系列平行的狭缝状孔，其延伸 垂直于活性阴极部分的纵向方向，平行于板状离子集电极平行于控制电极。