公开(公告)号：US3739220A

公开(公告)日：1973-06-12

申请号：US3739220D

申请日：1972-05-08

Applicant: GEN ELECTRIC

Inventor： JONES C ,  MARTIN S

IPC: C23C8/36 ,  C23C14/50 ,  F27D5/00 ,  H01J37/32 ,  H01L21/00 ,  H05B7/16 ,  H01J1/88

CPC classification number: H01L21/67017 ,  C23C8/36 ,  H01J37/32018

Abstract: An insulating support for the workpiece in a glow discharge apparatus. A workpiece table rests on and forms an acute angle with an insulating ceramic tube. A thin poorly conductive layer of sputtered metal deposit on the exterior of the tube, except at the location of the table and tube junction, forms a selfadjusting layer with a continuous potential gradient which suppresses arcing after the glow is established.