公开(公告)号：US10170304B1

公开(公告)日：2019-01-01

申请号：US15793621

申请日：2017-10-25

Applicant: GLOBALFOUNDRIES INC.

Inventor： Oh-Jung Kwon ,  Claude Ortolland ,  Dominic Schepis ,  Christopher Collins

IPC: H01L21/02 ,  H01L29/06 ,  H01L29/423 ,  H01L29/786 ,  H01L29/66

Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to self-aligned nanotube structures and methods of manufacture. The structure includes at least one nanotube structure supported by a plurality of spacers and an insulator material between the spacers and contacting the at least one nanotube structure.