公开(公告)号：US20190393077A1

公开(公告)日：2019-12-26

申请号：US16016910

申请日：2018-06-25

Applicant: GLOBALFOUNDRIES INC.

Inventor： Chih-Chiang Chang ,  Haifeng` Sheng ,  Jiehui Shu ,  Haigou Huang ,  Pei Liu ,  Jinping Liu ,  Haiting Wang ,  Daniel J. Jaeger

IPC: H01L21/762 ,  H01L29/66 ,  H01L21/768 ,  H01L29/78 ,  H01L21/8234 ,  H01L27/088

Abstract: The present disclosure relates to methods for forming fill materials in trenches having different widths and related structures. A method may include: forming a first fill material in a first and second trench where the second trench has a greater width than the first trench; removing a portion of the first fill material from each trench and forming a second fill material over the first fill material; removing a portion of the first and second fill material within the second trench; and forming a third fill material in the second trench. The structure may include a first fill material in trenches having different widths wherein the upper surfaces of the first fill material in each trench are substantially co-planar. The structure may also include a second fill material on the first fill material in each trench, the second fill material having a substantially equal thickness in each trench.