公开(公告)号：US10816483B2

公开(公告)日：2020-10-27

申请号：US16233336

申请日：2018-12-27

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jed H. Rankin ,  Guoxiang Ning ,  Paul W. Ackmann ,  Jung-Yu Hsieh ,  Ming Lei

IPC: G01N21/956 ,  G03F7/20 ,  G06T7/00

Abstract: A reticle inspection system and related method are disclosed. The system includes a concave spherical mirror positioned adjacent a side of the reticle that is configured to reflect inspection light transmitted through the reticle back towards and through the reticle. A sensor is configured to create at least one of: a first inspection image representative of a circuit pattern of the reticle based on transmission of the inspection light through the first side of the reticle and a reflection thereof by the concave spherical mirror through the second side of the reticle, and a second inspection image representative of the circuit pattern of the reticle based on the reflection of the inspection light from the first side of the reticle. A controller is configured to identify a defect in the reticle based on at least one of the first inspection image and the second inspection image.

公开(公告)号：US20200209166A1

公开(公告)日：2020-07-02

申请号：US16233336

申请日：2018-12-27

Applicant: GLOBALFOUNDRIES INC.

Inventor： Jed H. Rankin ,  Guoxiang Ning ,  Paul W. Ackmann ,  Jung-Yu Hsieh ,  Ming Lei

IPC: G01N21/956 ,  G06T7/00 ,  G03F7/20

Abstract: A reticle inspection system and related method are disclosed. The system includes a concave spherical mirror positioned adjacent a side of the reticle that is configured to reflect inspection light transmitted through the reticle back towards and through the reticle. A sensor is configured to create at least one of: a first inspection image representative of a circuit pattern of the reticle based on transmission of the inspection light through the first side of the reticle and a reflection thereof by the concave spherical mirror through the second side of the reticle, and a second inspection image representative of the circuit pattern of the reticle based on the reflection of the inspection light from the first side of the reticle. A controller is configured to identify a defect in the reticle based on at least one of the first inspection image and the second inspection image.