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公开(公告)号：US20200166702A1
公开(公告)日：2020-05-28
申请号：US16199468
申请日：2018-11-26
Applicant: GLOBALFOUNDRIES INC.
Inventor： Ajey Poovannummoottil JACOB , Marcus V. S. DAHLEM , Humaira ZAFAR , Anatol KHILO , Sujith CHANDRAN
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to rib waveguide structures and methods of manufacture. The structure includes: a waveguide structure comprising one or more bends, an input end and an output end; and grating structures which are positioned adjacent to the one or more bends of the waveguide structure.
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