公开(公告)号：US20180217584A1

公开(公告)日：2018-08-02

申请号：US15420749

申请日：2017-01-31

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Daniel Fischer ,  Yvonne Jänicke ,  Stephan Melzig ,  Alexander Ullrich ,  Martin Pilz

IPC: G05B19/418

CPC classification number: G05B19/41875 ,  G05B2219/32182 ,  G05B2219/32201 ,  G05B2219/45031 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.

公开(公告)号：US10185312B2

公开(公告)日：2019-01-22

申请号：US15420749

申请日：2017-01-31

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Daniel Fischer ,  Yvonne Jänicke ,  Stephan Melzig ,  Alexander Ullrich ,  Martin Pilz

IPC: G05B19/418

Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.