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公开(公告)号:US10833183B2
公开(公告)日:2020-11-10
申请号:US16177877
申请日:2018-11-01
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Joshua Dillon , Siva P. Adusumilli , Jagar Singh , Anthony Stamper , Laura Schutz
IPC: H01L29/76 , H01L29/66 , H01L29/872
Abstract: One device disclosed herein includes, among other things, first and second conductive features embedded in a first dielectric layer, a cap layer positioned above the first dielectric layer, a ballistic transport material contacting the first conductive member and positioned above a portion of the first dielectric layer, and first and second contacts contacting the first and second conductive features.
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公开(公告)号:US20200144404A1
公开(公告)日:2020-05-07
申请号:US16177877
申请日:2018-11-01
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Joshua Dillon , Siva P. Adusumilli , Jagar Singh , Anthony Stamper , Laura Schutz
IPC: H01L29/76 , H01L29/66 , H01L29/872
Abstract: One device disclosed herein includes, among other things, first and second conductive features embedded in a first dielectric layer, a cap layer positioned above the first dielectric layer, a ballistic transport material contacting the first conductive member and positioned above a portion of the first dielectric layer, and first and second contacts contacting the first and second conductive features.
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